Applied Materials, Inc.

Paul Vollmer

Hong Shih

Diana Xiaobing Ma

Jie Yuan

Nianci Han

Joe F Sommers

Michael C Willson

A corrosion-resistant protective coating for an apparatus and method of processing a substrate in a chamber containing a plasma of a processing gas. The protective coating or sealant is used to line or coat inside surfaces of a reactor chamber that are exposed to corrosive processing gas that forms the plasma. The protective coating comprises at least one polymer resulting from a monomeric anaerobic chemical mixture having been cured in a vacuum in the absence of oxygen. The protective coating includes a major proportion of at least one methacrylate compound and a minor proportion of an activator compound which initiates the curing process of the monomeric anaerobic mixture in the absence of oxygen or air.

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Lewisburg, OH, United States of America

Paul Vollmer