Silmach

Etat Francais Represente Par Le Delegue General Pour L'armement

Centre National De La Recherche Scientifique

Université De Franche Comte

Paul Vescovo

Patrice Minotti

Pierre-Francois Louvigne

Gilles Bourbon

Patrice Le Moal

Eric Joseph

Vianney Sadoulet

Vincent Walter

Louvigné Pierre-François

Philippe Hélin

Pierre-François Louvigné

Patrice Minottl

Pierre-François LouvignÉ

The disclosed micro-sensor includes: a substrate including a first portion and a second portion; a third portion and fourth portion provided between the portions and connected to the first portion and the second portion respectively by an elastic member; detection and a counter including: a counting gear, a third beam capable of meshing with the gear, an amplifier for the value of a relative movement between the portions and including: a first beam attached at one end thereof to the third portion and at the other end thereof to a plate, a second beam attached at one end thereof to the fourth portion and at the other end thereof to the plate, the third beam being attached on one side to the plate and including a tooth capable of meshing with the gear.

Amplified passive and reversible micro-sensor of deformations

An actuation device () which includes an actuation element () with a fixed 10 portion () and a driving portion (); wherein the fixed portion () includes a crawling surface (). The driving portion () includes a flexible moveable blade () positioned in parallel and at a distance from the crawling surface (). When a power supply voltage is applied between the moveable blade () and the crawling surface (), the free end () comes into contact with the crawling surface (), and a contact area, between the moveable blade () and the crawling surface (), increases by propagation of the crawling front () along the moveable blade (). The propagation of the crawling front displaces the moveable blade () according to a first orientation.

Actuation device with a drive element actuated by crawling

The present invention relates to the field of microsensors, and particularly to a passive and reversible deformation sensor, specifically cycles of deformations in a direction OX of a structure, specifically during cycles of temperatures or mechanical stresses to which the structure is subjected, this sensor including elements () for detecting and, preferably, counting cycles of variations in the distance between two points or areas of a structure, these elements including a support having first and second portions () attachable to, respectively, either of the two points or areas of the structure, wherein the detecting elements are associated with each of the first and second portions of the support, sensor characterized by in that the detecting elements include elements () for distinguishing between at least two different thresholds of cycles of variations in distance.

Passive, reversible deformation sensor

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Besancon, France

Paul Vescovo