Solmates B.v.

Paul Te Riele

Jan Matthijn Dekkers

Jan Arnaud Janssens

Joska Johannes Broekmaat

Gerard Cornelis Van Den Eijkel

Jan Amaud Janssens

Gerard Van De Eijkel

The invention relates to a method for depositing a material for a target onto a surface of a sample, which method comprises the steps of: irradiating a surface of the target with a laser or electron beam to generate a plume of target material particles; positioning the sample near the plume, such that the target material particles are deposited onto the surface of the sample; rotating the sample around a rotation axis being perpendicular to the surface of the sample onto which the particles are deposited; moving the laser beam along the surface of the target, such that the plume moves in a radial direction in relation to the rotation axis; pulsing the laser beam at a variable frequency.

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The Hague, Netherlands

Paul Te Riele