Maxtor Corporation

Lam Research Corporation

Paul Stasiewicz

Cangshan Xu

Erik H Engdahl

Robert Dean Turner

Robert F Taff

Kenneth J Bahng

William L Drake

Jeff Gasparitsch

Gary Holland

Rick Tufty

An internal support interface which provides vibration and acoustic isolation. A stationary shaft has a medial portion about which a rotatable member rotates. An end portion of the shaft has an annular base surface surrounding a stub shaft projection. A substantially planar housing member has a support post which extends from an annular interior surface in adjacent, non-contacting proximity to the stub shaft projection to form a gap therebetween. An annular damping member mutually contactingly surrounds the stub shaft projection and the support post while being compressed between the base surface of the shaft and the interior surface of the housing member.

Internal support interface between a shaft and housing member with vibration and acoustic isolation

A filter assembly in the form of a laminated structure incorporates a breather filter section and a recirculation filter section. A hinge is incorporated in the laminated structure to allow the recirculation filter section to be moved relative to the breather filter section during installation of the filter assembly in a disk drive. A low permeability side of the breather filter section is disposed on the 'environment' side of a filtering media to control access to the filtering media from the environment. A high permeability side of the breather filter section is disposed on the 'drive side' of this filtering media to control access to the filtering media from within the interior of the drive.

Disk drive with flexible, integrated breather/recirculation filter elements

A platen for use in chemical mechanical planarization (CMP) systems is disclosed. The platen is arranged below a linear polishing pad and designed to apply a controlled fluid flow to the underside of the linear polishing pad. The platen includes a leading zone containing a first plurality of output holes. The leading zone is oriented more proximate to an upstream region of the linear polishing pad. The platen also includes a trailing zone containing a second plurality of output holes. The trailing zone is oriented more proximate to a downstream region of the linear polishing pad. The leading zone and the trailing zone are independently controlled and designed to output the controlled fluid flow independently from each of the first plurality of output holes and the second plurality of output holes.

Apparatus for controlling leading edge and trailing edge polishing

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Arvada, CO, United States of America

Paul Stasiewicz