Berkeley Process Control, Inc.

Xio, Inc.

Mikuni Kogyo Kabushiki Kaisha

Other

Berkley Process Control, Inc.

Paul Sagues

Nathan H Harding

Larry Brasfield

Robert T Wiggers

Steven M Kraft

Mauritz Botha

Sanjay K Aggarwal

Takashi Ishida

Shuichi Kamiyama

Masayoshi Tomizuka

David M Auslander

Tim K Wong

Prasad Padmanabhan

John T Peuarch

John T Peurach

Sanjay D Aggarwal

Leslie H Woods

Vernon E Muhr

Peter Sagues

Darrell Alessi Hunger

Peter K Moy

Kevin D D'Souza

John Rogers

Stephen A Gaudio

A configurable, connectorized system for providing supervisory and distributed control dramatically reduces the number of wire connections that must be made to connect sensors and actuators to a control system, reducing the number of different control hardware components required to connect one or more sensors and actuators through use of a configurable I/O module.

Configurable, connectorized server-augmented control system

A configurable, connectorized method and apparatus for driving a solenoid coil reduces energy consumption and heating of the solenoid coil, allows detection of the solenoid state, and simplifies connections to the solenoid.

Configurable solenoid actuation method and apparatus

A computer-based simulator, separate from a computer process control system, that simplifies the electrical interconnection of the computer-based simulator to the computer control system and reduces the number of hardware components required to effect a computer-based simulator. The invention also facilitates remote configuration and operation of the control and simulator systems.

Control system simulator and simplified interconnection control system

An input/output module includes a device communication connector apparatus for connecting at least one conductor between the module and at least one device and interface apparatus for causing the module to place any of a plurality of signals on any of a plurality of contacts of the device communication connector apparatus. The interface apparatus includes at least one electronic integrated circuit providing a selectable interconnection apparatus to a particular one of the contacts. The interface apparatus is configurable by a user of the module. A method of configuring the module includes providing inputs on a personal computer, communicating with a web server embedded in the module, to determine a specific interconnection apparatus for each of the contacts.

Electronically configurable connector module

An input/output module for implementing directions from a controller for sending and receiving signals to and from devices. The input/output module includes a microprocessor for communication with, and receiving programming from the controller. The input/output module further includes device communication connectors, each having number of pins, each pin for interconnection with a cable conductor to a device. The input/output module has an ASIC for each of the pins, providing a controlled interface with the corresponding pin. Each ASIC has interconnection apparatus, selectable by the microprocessor for providing a particular interface with the pin served by the ASIC.

System for programmed control of signal input and output to and from cable conductors

A system for wafer handling employing a complex numerical method for calculating a path of wafer travel that controls wafer acceleration and jerk, and results in maximum safe speed of wafer movement from a first point to a second point. Motion is begun along a straight line segment while accelerating to a first path velocity. During this acceleration, the system computer calculates a series of straight line segments and interconnecting sinusiodally shaped paths over which the wafer is to be guided to the second point. The straight line segments and sinusiodally shaped paths are calculated so as to minimize total path length and the time required to move the wafer from the first point to the second point. The system computes the point of entrance and exit to and from each straight and sinusoidal path.

System of path planning for robotic manipulators based on maximum acceleration and finite jerk constraints

A system for making interconnections between an input/output module and a first device and a second device wherein the system uses standard cables and connectors. The input/output module includes a standard first connector for making connection with a standard first transmission line cable for conveying signals between the module and the first device, and at least one second connector, with such second connector connecting to a first end of a second standard cable. A second end of the second standard cable includes a standard cable connector for making connection to a corresponding connector of the second device. The input/output module is configured to contain programmable logic for making the required connections between the module and the first and second devices.

Configurable connectorized I/O system

A wafer handling apparatus having input and output robotic systems directed by a programmed controller. Each system has components including a robot, a twist and rotate, and a carrier and automated carrier rail. The input system is for removing wafers from their wafer pod, placing them in the carrier and transporting them via the rail to a wafer processing area. The output system performs the reverse operation, taking wafers from a carrier following processing and placing them in a pod. Each robot includes a plurality of interconnected, articulated cantilevered arms. The last one of the arms has a wand on one end and a laser emitter detector on the other end, and operates in cooperation with the controller to provide location detection of system components. The controller also includes circuitry for sensing contact of the wand with an object by measuring the increased robot motor torque occurring upon contact. The controller is pre-programmed with approximate physical dimensions of the system components and their relative positions. The controller is additionally programmed to automatically perform a precision calibration/teaching routine to gather more precise location data. The process of precision teaching/calibration begins by placing a pod calibration fixture on a pedestal. The controller then directs the input robot to sense the fixture position, which gives the controller precise data relating to the position of a pod on the pedestal. The robot then senses the position of the twist and rotate components. The process begins by sensing the height of two arms of the twist and rotate, and the controller adjusts the arm heights until they are level. The controller then directs the robot to sense the R and &thgr; dimensions of the twist and rotate, and these precise dimensions are saved in the controller.

Self teaching robotic wafer handling system

Briefly, a preferred embodiment of the present invention includes a wafer carrier buffer for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer has a sliding carrier first input apparatus for taking a carrier from outside the buffer through a buffer input door and into the buffer interior. A buffer controller is included for directing robotic apparatus to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for delivery of wafers to processing. The robotic apparatus also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need of calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.

Self teaching robotic carrier handling system

An alignment device for use with a robot for manipulating and aligning a series of semiconductor wafers with respect to an edge fiducial and the center of each wafer is disclosed. The device includes a rotary vacuum chuck for holding a wafer, and an edge detector comprising a light source that extends across the wafer edge as it moves and creates a shadow that falls on a charge coupled device (CCD) below. Output data from the CCD relative to the wafer edge position is processed by a programmable logic circuit and converted to quadrature data which is fed to the logic section of a controller. The controller is programmed to calculate the location of the wafer fiducial relative to the chuck axis and further to calculate the angular and distance offset of the wafer center from the longitudinal axis of the robot arm so that the robot arm can be moved to center the wafer with its fiducial at a preselected location before the wafer is removed from the rotary chuck.

Wafer aligner system

A method and apparatus for automatically calibrating the precise positioning of a wafer handling robot relative to a target structure is disclosed. The apparatus comprises a machine controller connected to robot having an end-effector with three degrees of movement. The controller has a memory with stored rough distance and geometrical data defining the general location of structural features of the target structure. The robot is programmed to move toward the target structure in a series of sequential movements, each movement culminating with the robot end-effector touching a preselected exterior feature of the target structure. Each touching of the end-effector is sensed and provides data for the controller which then calculates the precise location of the target structure. The data accumulated during a series of touching steps by the robot end-effector is utilized by the controller to provide a precise calibrated control program for future operation of the robot.

Touch calibration system for wafer transfer robot

Multi-axis motion controller

A system for automatically calibrating a semiconductor wafer handling robot so that the robot will move wafers into and out of precise locations within enclosures that form process stations or storage cassettes is disclosed. The system comprises a controller having memory and logic sections connected to a robot having an articulated arm that is movable in vertical (Z), horizontal (.theta.), and radial (R) directions and having a wafer retaining wand at the end of the arm. Dimensional characteristics of the robot wand and the enclosures are stored in the controller memory. Sensors are provided at each enclosure and/or the robot wand which are activated and provide signals to the controller that are relative to the wand position. The robot is programmed to execute a series of progressive movements at each enclosure location which are controlled by a combination of sensor response signals and the appropriate dimensional characteristics. At the end of the programmed movements, the robot wand is positioned within a process station or cassette so that it can engage for removal or release a wafer therein at a precise predetermined location.

Automatic calibration system for wafer transfer robot

An electronic chassis is disclosed for supporting components such as a CRT device or flat panel display unit and adapted for installation through an opening in a cabinet without requiring access from within the cabinet to secure the chassis in place. The frontal end of the chassis has flange members on opposite sides which fit against the cabinet surface around its opening. One side of the chassis frontal end has a movable retainer means controlled by one or more drive screws that can be adjusted to grip one side of the cabinet opening. Continued actuation of the drive screws moves the chassis into locking contact with a fixed retainer means on the opposite side of the chassis. A bezel frame member attached to the frontal end of the chassis covers the drive screws but has access holes to facilitate their adjustment, and gaskets are provided on the bezel frame to prevent moisture from entering the chassis or the cabinet opening.

Chassis assembly with means for mounting within thin wall opening

Method and apparatus for measuring the velocity, whether rotary or reciprocating, of a servo shaft driven cyclically by a motor, without employing a tachmometer, while maintaining accuracy despite environmental electrical noise. From movement of the shaft a pair of overlapping square-wave signals in quadrature are produced with transition expressible in Gray Code for each cycle. A clock continuously produces a large number of evenly spaced clock pulses constituting a series of consecutive sample intervals. A signed value representing the algebraic sum of all the quadrature transitions occurring during a sample interval is determined and stored. The number of clock pulses between two quadrature transitions, each transition being the last qualified transition of the two most recent sample intervals having transitions is determined. A computer divides the sample intervals by the number of clock pulses which occurred between the selected quadrature transitions.

Growing community of inventors

Ross, CA, United States of America

Paul Sagues