Northern Telecom Limited

Paul Mark Harrison

Robert George Peall

James Wilson Parker

Peter J Ayliffe

Martin Christopher Geear

Terry Victor Clapp

Stefano Bertolini

Roger William Harcourt

This disclosure relates to the fabrication of components on a single crystal substrate. A method is disclosed of overcoming the problems encountered in defining etched features on a silicon substrate. In particular, there is disclosed a method of producing a multichip module comprising a silicon substrate having surface features for the placement of components. An organic dielectric is applied to the substrate prior to the use of an etchant whereby interconnects can be defined.

Crystal substrate processing

An injection laser assembly mounted upon a crystal substrate [10] employing a back facet monitor is disclosed. A graded index lens [34] focuses light from the, typically, high in diversion and low intensity rays output from the back facet of the laser [30]. To allow repeatable and efficient coupling the graded index lens [34] is mounted within a groove defined in the crystal. Several configurations for mounting a photodiode sensor [P1,P2] are possible.

Injection laser assembly incorporating a monitor photosensor

A process for use in manufacturing opto-electronic components in opto-electronic hybrid module form. V-grooves (42) are provided by anisotropic etching techniques in a silicon substrate (41). Electrical ground planes (43) and interconnects (46, 49) are provided on dielectric layers (44, 50) with interconnections between them by way of vias (45, 51). Solder wettable pads (52) are provided on the outermost dielectric layer (50). Solder bumps (54) for use in a flip-chip bonding technique are provided by a wet forward technique. Components such as a laser array (30) are bonded to the solder bumps in accurate alignment therewith.

Process of providing uniform photoresist thickness on an opto-electronic

A method of making a multilayer printed circuit upon a single crystal substrate for the mounting thereon of a semiconductor laser and an optical fibre pigtail located in a crystallographically etched groove in the substrate wherein all the photolithographic processing required to create the multilayer printed circuit is performed prior to the etching of the groove.

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Springfield, United Kingdom

Paul Mark Harrison