Entegris, Inc.

Paul Magoon

George Gonnella

James Cedrone

Iraj Gashgaee

Marc Brian Laverdiere

Timothy J King

Raul A Ramirez

Russ V Raschke

Brian Wiseman

Huaping Wang

Traci L Batchelder

Jennifer M Braggin

A spacer for parts of a reticle pod includes spacer contacts configured to contact alignment features of a cover and a baseplate of the reticle pod such that the cover and baseplate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include a spring arm allowing deformation such that the spacer contacts can be moved relative to one another to facilitate interfacing with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.

Perimeter frame for spacing reticle pods

Spacer applied to reticle container

Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. A value for a goodness of fit measure comparing the operating profile and baseline profile can be established. If the goodness of fit measure is insufficient, an alarm may be sent or another action taken, for example the pumping system may shut down, etc. An example goodness of fit measure is an R-squared measure.

System and method for operation of a pump

Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

System and method for variable dispense position

The disclosure describes systems and methods relating generally to filtration. Even more particularly, this disclosure relates to controlling the operation of a pump using filter information. A removable filter can include an electronically readable tag storing filter information. The filter information can be read by a tag reader and rules applied to the filter information to determine whether or how to operate a pump.

Method and system for controlling operation of a pump based on filter information in a filter information tag

System and method for a variable home position dispense system

The disclosure describes systems and methods relating generally to filtration. Even more particularly, embodiments described herein relate to optimizing operating routines of a pump based on filter information and process fluid information. The filter information can be stored on an electronically readable tag on the filter.

Method and system for optimizing operation of a pump

Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).

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Merrimack, NH, United States of America

Paul Magoon