Micron Technology Incorporated

Bechtel Bwxt Idaho, Lcc

Eg&g Idaho, Inc.

Paul L Taylor

Herschel B Smartt

John A Johnson

Edward W Reutzel

Arthur D Watkins

Kevin L Kenney

Denis E Clark

Nancy M Carlson

Matthew T Nelson

Kent C McBride

An end effector of a robot tool that includes accelerometers and methods to sense end effector motion. A semiconductor substrate or similar object may be supported by the end effector. Motion of the end effector and associated substrate movement may be transduced and sampled according to specified conditions. The sampled data may be processed, stored and analyzed for subsequent use, and/or may be used in near real time to control end effector movement. Sampled data representative of mechanical events associated with end effector movement may be communicated to a remotely operated processor system.

Semiconductor wafer processing accelerometer

Apparatus for determining a quality of a weld produced by a welding device according to the present invention includes a sensor operatively associated with the welding device. The sensor is responsive to at least one welding process parameter during a welding process and produces a welding process parameter signal that relates to the at least one welding process parameter. A computer connected to the sensor is responsive to the welding process parameter signal produced by the sensor. A user interface operatively associated with the computer allows a user to select a desired welding process. The computer processes the welding process parameter signal produced by the sensor in accordance with one of a constant voltage algorithm, a short duration weld algorithm or a pulsed current analysis module depending on the desired welding process selected by the user. The computer produces output data indicative of the quality of the weld.

Method and apparatus for assessing weld quality

An integrated optical sensor for arc welding having multifunction feedback control. The sensor, comprising generally a CCD camera and diode laser, is positioned behind the arc torch for measuring weld pool position and width, standoff distance, and post-weld centerline cooling rate. Computer process information from this sensor is passed to a controlling computer for use in feedback control loops to aid in the control of the welding process. Weld pool position and width are used in a feedback loop, by the weld controller, to track the weld pool relative to the weld joint. Sensor standoff distance is used in a feedback loop to control the contact tip to base metal distance during the welding process. Cooling rate information is used to determine the final metallurgical state of the weld bead and heat affected zone, thereby controlling post-weld mechanical properties.

Integrated optical sensor

Growing community of inventors

Boise, ID, United States of America

Paul L Taylor