Fluke Corporation

Asml Netherlands B.v.

University of Twente

Paul Klatser

Johannes Wilhelmus Eikenbroek

Bert Pieter Van Drieënhuizen

Paulus Wilhelmus Leonardus Van Dijk

Chris Gerardus Hermanus Roeloffzen

Willem Paul Beeker

Antonius Johannes Maria Montagne

Jeroen-Frank Dekkers

Leimeng Zhuang

Marcus Hagting

Egbert Jan Kruisdijk

A phased-array antenna that includes a photonic beamformer is disclosed. In some embodiments, a front stage of electrical-domain processing applies a 16-to-1 signal-combination ratio, a single stage of photonic beamforming applies a 4-to-1 signal-combination ratio, and a passive, electrical-domain, signal combiner applies a 32-to-1 signal-combination ratio.

Electronically-steered Ku-band phased array antenna comprising an integrated photonic beamformer

A system and method allow for a more effective and efficient patterning device architecture and control arrangement. A lithography apparatus comprises an illumination system, a patterning device, and a projection system. The illumination system is configured to condition a beam of radiation. The patterning device is configured to pattern the beam of radiation. The patterning device comprises a control system and an array of individually controllable elements. The control system is configured to convert analog signals having respective first voltage values to corresponding differential control signals having second, higher voltage values. Corresponding ones of the individually controllable elements in the array of individually controllable elements are configured to actuate based on receiving a corresponding one of the differential control signals. The projection system is configured to project the patterned beam onto a target area of a substrate.

Patterning device

A voltage isolation circuit having an improved method of combining the HF path and LF path is provided. The LF path comprises an opto-isolator to achieve voltage isolation of the input signal while passing low frequencies. The HF path comprises a transformer to achieve voltage isolation of the input signal while passing high frequencies. The HF path and LF path are combined at a summing node to obtain an isolated input signal. Obtaining a flat frequency response requires that the cross-over frequency between the LF path and HF path be closely matched. A portion of the LF path is injected into the HF path such that LF components are canceled out in the region of the transition frequency. In this way, the pole frequency of the transformer in the HF path may be compensated for to achieve a flat frequency response for the combined LF and HF paths.

Voltage isolation circuit for a measurement channel

A method and apparatus for measuring very short time periods, or differences between two events, such as the delta-T between a trigger point on a waveform and a sampling clock edge of a digital oscilloscope. The delta-T measurements are made using the time-to-voltage transformation of an integrator. The output sweep ramp of the integrator is normalized to a fixed differential time and differential amplitude by correction current provided by a reference circuit that has a reference integrator substantially identical to the delta-T integrator. The reference integrator is operated at the same timing as the delta-T integrator, and an error correction loop furnishes the right amount of current to both integrators to normalize the peak voltage of both to a predetermined reference voltage.

Delta-T measurement circuit

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Markelo, Netherlands

Paul Klatser