Georgia Tech Research Corporation

Paul Jayachandran Joseph

Paul Albert Kohl

Clifford Lee Henderson

Hollie K Reed

Sue Ann Bidstrup-Allen

Celesta E White

Farrokh Ayazi

Sue Ann Bidstrup Allen

Microstructures and methods of fabricating microstructures are disclosed. One exemplary microstructure, among others, includes a substrate, an overcoat layer disposed upon the substrate, an air-region within at least a portion of the overcoat layer, and a framing material layer engaging at least a portion of the air-region on the inside of the framing material layer and engaging the overcoat layer on the outside of the framing material layer.

Microstructures and methods of fabrication thereof

Embodiments of the present disclosure provide systems and methods for producing micro electro-mechanical device packages. Briefly described, in architecture, one embodiment of the system, among others, includes a micro electro-mechanical device formed on a substrate layer; and a thermally decomposable sacrificial structure protecting at least a portion of the micro electro-mechanical device, where the sacrificial structure is formed on the substrate layer and surrounds a gas cavity enclosing an active surface of the micro electro-mechanical device. Other systems and methods are also provided.

Packaging for micro electro-mechanical systems and methods of fabricating thereof

Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.

Sacrificial compositions and methods of fabricating a structure using sacrificial compositions

Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a composition having a sacrificial polymer and a photoacid generator.

Growing community of inventors

Atlanta, GA, United States of America

Paul Jayachandran Joseph