Memx, Inc.

Sandia Corporation

Becton Dickinson and Company Limited

Other

The United States of America As Represented by the Department of Energy

Paul Jackson McWhorter

Jeffry Joseph Sniegowski

Samuel Lee Miller

Murray Steven Rodgers

Stephen M Barnes

M Steven Rodgers

James H Smith

Stephen Montague

William Michael Miller

Dale L Hetherington

Christopher Alan Apblett

Robert D Nasby

Anthony J Farino

Jeffrey J Sniegowski

Daniel P Aeschliman

One embodiment of a MEMS flow module () includes a first plate () and a second plate () that are separated by a first link (). A plurality of concentrically disposed, annular flow-restricting walls () extend from the first plate (), and each is separated from the second plate () by a flow-restricting gap (). When the MEMS flow module () is exposed to a differential pressure and in one configuration, a perimeter () of the first plate () flexes away from the second plate () (and at least generally about where the first link () interfaces with the first plate ()) to increase the size of one or more of the flow-restricting gaps (), to in turn accommodate an increased flow or flow rate through the MEMS flow module ().

Glaucoma implant having MEMS flow module with flexing diaphragm for pressure regulation

Various MEMS filter elements or modules are disclosed, and which may be used in a glaucoma implant (). One such MEMS filter module () includes a first film () and a second film () that are spaced and interconnected by a plurality of supports (). A plurality of first flow ports () extend through the first film (), and a plurality of second flow ports () extend through the second film (). A plurality of annular filter walls () extend from the second film () toward the first film (), and are separated therefrom by a filter trap gap ().

Glaucoma implant having MEMS filter module

Various embodiments of MEMS flow modules that may be disposed in a flow path () of a shunt () are disclosed, where the shunt () may be used to control a flow out of an anterior chamber () of an eye (). One such MEMS flow module () has a tuning element () and a lower plate (). A plurality of springs or spring-like structures () interconnect the tuning element () with the lower plate () in a manner that allows the tuning element () to move either toward or away from the lower plate (), depending upon the pressure being exerted on the tuning element () by a flow through a lower flow port () on the lower plate (). The tuning element () is disposed over this lower flow port () to induce a flow through the MEMS flow module () along a non-linear (geometrically) flow path.

Implant having MEMS flow module with movable, flow-controlling baffle

Various MEMS filter elements or modules are disclosed. One such MEMS filter module () includes a first film () and a second film () that are spaced and interconnected by a plurality of supports (). A plurality of first flow ports () extend through the first film (), and a plurality of second flow ports () extend through the second film (). A plurality of annular filter walls () extend from the second film () toward the first film (), and are separated therefrom by a filter trap gap (). A filter trap chamber () is disposed on each side of each filter trap gap (). Therefore, fluid will flow into one filter trap chamber (), through a filter trap gap (), and into another filter trap chamber (), whether the flow is introduced into the filter module () through the first flow ports () or the second flow ports ().

MEMS filter module

A cutting blade () having a cutting edge () defined by an intersection of a first cutting edge surface () and a second cutting edge surface () is disclosed. The angle between the first cutting edge surface () and the second cutting edge surface () defines a blade angle (&#x3b8;). The blade () may be fabricated from a wafer () by an anisotropic etch. An upper surface () of the wafer () is defined by a first set of 3 Miller indices, where at least one individual Miller index of this first set has an absolute value greater than 3. A top surface () of the blade () is defined by part of the upper surface () of the wafer (). The anisotropic etch proceeds until reaching a particular crystallographic plane to define the first cutting edge surface (). Having the top surface () of the blade () defined by the noted set of 3 Miller indices increases the potential that a blade angle (&#x3b8;) of a desired magnitude may be realized.

Microkeratome blade with arbitrary blade angle

A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.

Microelectromechanical system with non-collinear force compensation

The present invention is directed to off axis optical signal redirection architectures that employ positionable reflective microstructures (e.g. microelectromechanical (MEM) mirrors) fabricated on one or more substrates. In one embodiment, an optical signal redirection system () includes a reflective microstructure array () formed on a substrate (). The reflective microstructure array () includes one or more reflective microstructures (). Each of the reflective microstructures () includes an optically reflective surface () and is positionable with respect to the substrate () in order to orient its reflective surface () for redirecting optical signals () incoming from one or more originating locations () to one or more target locations (). Each orientation required for a given reflective microstructure () to redirect an optical signal () incoming from an originating location () to a target location () is defined by a unit vector () that is normal to the reflective surface () of such reflective microstructure (). An average normal vector () associated with the reflective microstructure array () defined as the average of the set of individual unit normal vectors () forms a first non-zero angle &#x3b8; with respect to the substrate normal ().

Off axis optical signal redirection architectures

The present invention provides a MEM system () having a platform () that is both elevatable from the substrate () on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (). In one embodiment, the MEM system () includes the platform (), a pair of A-frame structures (), and two pairs of actuators () formed on the substrate (). Ends (A) of rigid members () extending from apexes (A) of the A-frame structures () are attached to the platform () by compliant members (A,B). The platform () is also attached to the substrate () by a compliant member (C). The A-frame structures () are separately pivotable about bases (B) thereof. Each pair of actuators () is coupled through a yoke () and displacement multiplier () to one of the A-frame structures () and is separately operable to effect pivoting of the A-frame structures () with respect to the substrate () by equal or unequal angular amounts. Upon pivoting, the A-frame structures () act as lever arms to both lift the platform () and tilt the platform () with respect to the substrate () with at least one degree of freedom. Since the platform () lifts up from the surface of the substrate (), it may be tilted at large angles with respect to the substrate ().

Microelectromechnical system for tilting a platform

The present invention provides a MEM system ( ) having a platform ( ) that is both elevatable from the substrate ( ) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate ( ). In one embodiment, the MEM system ( ) includes the platform ( ), a pair of A-frame structures ( ), and two pairs of actuators ( ) formed on the substrate ( ). Ends ( A) of rigid members ( ) extending from apexes ( A) of the A-frame structures ( ) are attached to the platform ( ) by compliant members ( A, B). The platform ( ) is also attached to the substrate ( ) by a compliant member ( C). The A-frame structures ( ) are separately pivotable about bases ( B) thereof. Each pair of actuators ( ) is coupled through a yoke ( ) and displacement multiplier ( ) to one of the A-frame structures ( ) and is separately operable to effect pivoting of the A-frame structures ( ) with respect to the substrate ( ) by equal or unequal angular amounts. Upon pivoting, the A-frame structures ( ) act as lever arms to both lift the platform ( ) and tilt the platform ( ) with respect to the substrate ( ) with at least one degree of freedom. Since the platform ( ) lifts up from the surface of the substrate ( ), it may be tilted at large angles with respect to the substrate ( ).

Microelectromechanical system for tilting a platform

Micromechanical platform pivotal on a compliant member

A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with-the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Microelectromechanical apparatus for elevating and tilting a platform

Mirror positioning assembly with vertical force component compensation

The present invention provides a free space optical cross connect for switching optical signals between a plurality of optical signal ports to/from the switch interface. In one embodiment, a single chip 2N OXC ( ) for switching optical signals ( ) between any one of N input optical fibers ( ) and any one of N output optical fibers ( ) within a compact free space switch interface ( ) includes N reflective microstructures ( ) built/assembled on a substrate ( ) and N positioning systems ( ) associated with the reflective microstructures ( ) that are also built/assembled on the substrate ( ). The positioning systems ( ) are operable to both elevate their associated reflective microstructures ( ) from the surface of the substrate ( ) and to tilt their associated reflective microstructures ( ) with at least two degrees of freedom with respect to the surface of the substrate ( ) in order to reflect optical signal ( ) through the switch interface ( ) from any one of the input optical fibers ( ) to any one of the output optical fibers ( ). The single chip 2N OXC ( ) may also include a lid ( ) overlying and spaced away from the substrate ( ) to provide a hermetically sealed package ( ).

Single chip optical cross connect

A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Growing community of inventors

Albuquerque, NM, United States of America

Paul Jackson McWhorter