Applied Materials, Inc.

Paul J Steffas

David Masayuki Ishikawa

Ajey M Joshi

Nag B Patibandla

Brian Hayes Burrows

Hou Tee Ng

Todd J Egan

Raanan Y Zehavi

Sumedh Acharya

Eric Ng

Zhengping Yao

Ryan C Boas

Kashif Maqsood

Kenneth S Ledford

Embodiments described herein provide substrate support assemblies for retaining a surface of a substrate having one or more devices disposed on one or more surfaces of the substrate without contacting the one or more devices and preventing changes in profile of the substrate. The substrate support assembly allows for control of the substrate. The substrate support assembly includes a gas nozzle disposed through a body of the substrate support assembly. The gas nozzle provides a gas to the substrate. The gas is operable to provide pressure to the substrate to reduce contact on the substrate and to control the profile of the substrate.

Using controlled gas pressure for backside wafer support

An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material on a platform, a light source configured to generate a light beam, an auxiliary polygon mirror scanner configured to receive the light beam from the light source and reflect the light beam, and a primary mirror scanner to receive the light beam reflected by the auxiliary polygon mirror scanner and direct the light beam to impinge on an exposed layer of feed material.

Additive manufacturing with dithering scan path

An additive manufacturing apparatus includes a platform, a dispenser to deliver a plurality of successive layers of feed material on the platform, a light source to generate one or more light beams, a first galvo mirror scanner positioned to direct a first light beam onto a topmost layer of the plurality of successive layers, a second galvo mirror scanner positioned to direct a second light beam onto the topmost layer of the plurality of successive layers, and a controller configured to cause the first galvo mirror scanner to direct the first light beam to pre-heat or heat-treat an area of the topmost layer and to cause the second galvo mirror scanner to direct the second light beam to fuse the area of the topmost layer.

Additive manufacturing with multiple mirror scanners

An additive manufacturing system includes a platform to support an object to be fabricated, a dispenser to deliver a plurality of layers of a feed material over the platform, a controller configured to store digital data representing a pre-defined pattern, a laser configured to generate a laser beam to impinge an outermost layer of the feed material and coupled to the controller to fuse the feed material in the pre-defined pattern, and a plurality of independently controllable infrared lamps, each infrared lamp directed to a different section of an outermost layer of the feed material.

Additive manufacturing having energy beam and lamp array

A method of additive manufacturing includes storing a plurality of predetermined cell processing recipes, dispensing a layer of a plurality of successive layers of feed material on a platform, receiving data describing an area of the layer of the feed material to fuse, determining a combination of a plurality of non-overlapping cells that substantially cover the area, and sequentially processing the plurality of cells. Each cell processing recipe includes scan path data indicating a path for an energy beam to follow, and different cell processing recipes having different paths for the energy beam. Each cell of the plurality of cells gets an associated cell processing recipe selected from the plurality of predetermined cell processing recipes. Each cell is processed by causing an energy beam to follow the first path for the cell processing recipe associated with the cell.

Additive manufacturing with cell processing recipes

An additive manufacturing system includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, a light source to generate a first light beam and a second light beam, a polygon mirror scanner, a galvo mirror scanner positioned adjacent to the polygon mirror scanner, and a controller. The controller is coupled to the light source, the polygon mirror scanner and the galvo mirror scanner, and the controller is configured to cause the light source and polygon mirror scanner to apply the first light beam to a region of the layer of feed material, and to cause the light source and galvo mirror scanner to apply the second light beam to at least a portion of the region of the layer of feed material.

Additive manufacturing with polygon and galvo mirror scanners

A dispensing system for an additive manufacturing includes a powder source that contains powder to form an object, and an array of nozzles positioned at a base of the powder source over a top surface of a platen where the object is to be formed. The powder flows from the powder source through the nozzles to the top surface. A respective powder wheel in each nozzle controls a flow rate of the powder. Each wheel has multiple troughs on surface of the wheel. When a motor rotates the wheel, the troughs transport the powder through the nozzle. The rotation speed of the wheel controls the flow rate. For solid parts of the object, the wheel rotates and allows the powder to be deposited on the top surface. For empty parts of the object, the wheel remains stationary to prevent the powder from flowing to the surface.

Selective powder delivery for additive manufacturing

An additive manufacturing apparatus includes a platform, a dispenser to dispense successive layers of feed material on the platform, a heat source above the platform, an energy source to emit a beam of energy to impinge a second region of the topmost layer, a sensor system to measure temperatures of the topmost layer of feed material and to measure a dimension of a melt pool in the second region, and a controller. The heat source is configured to deliver energy to a first region of a topmost layer of the successive layers of feed material to pre-heat and/or heat-treat the first region. The controller is configured to operate the heat source to heat the topmost layer of feed material based on the measured temperatures, and operate the energy source to fuse feed material in the topmost layer based on the measured dimension.

Temperature control for additive manufacturing

The present disclosure provides apparatus and methods for monitoring and controlling filaments used in hotwire semiconductor processing and for monitoring integrity of filaments in a hotwire processing chamber. Embodiments of this disclosure may use real time voltage and current feedback signals provided by the power supply, known attributes, for example resistivity, of filament, filament geometries, for example diameter and length, and filament assembly configurations as input, to derive filament temperature in real time. Embodiments of the present disclosure are capable of continuously derive accurate temperatures of the filament assembly in a hotwire processing chamber after the filament assembly has changed geometries due to normal usage by using the measured cold resistance of the wire periodically before the process starts.

Filament temperature derivation in hotwire semiconductor process

In some embodiments, an substrate processing system may include a chamber body, a heater assembly disposed within the chamber body, wherein the heater assembly includes a plurality of resistive heater elements coupled together to form an isothermal heated enclosure, and a process kit disposed within the isothermal heated enclosure and having an inner processing volume that includes a plurality of substrate supports to support substrates when disposed thereon, wherein the process kit includes a first processing gas inlet to provide processing gases to the inner processing volume, a first carrier gas inlet to provide a carrier gas to the inner processing volume, and a first exhaust outlet, and a first gas heater coupled via a first conduit to the first carrier gas inlet to heat the carrier gas prior to flowing into the inner processing volume.

Process gas preheating systems and methods for double-sided multi-substrate batch processing

A semiconductor processing system including a printed circuit board structure for delivering power to an assembly of radiant energy sources. The printed circuit board structure, in one configuration, forms an evacuable housing for the assembly of radiant energy sources.

Growing community of inventors

Santa Clara, CA, United States of America

Paul J Steffas