Seagate Technology Incorporated

Mobile Storage Technology, Inc.

Paul J Poisson

Bruce D Emo

James M Jones

Mark August Toffle

Rodney Dale Dahlenburg

Steve Sheeran

Colin Graham Presly

Mark Dennis Anderson

Embodiments of the present invention are directed to establishing a desired position control over a workpiece by compensating for thermal cycling affecting a member supporting the workpiece during processing.

Position control with compensation for thermal cycling of a workpiece support

A mass moves within a bore defined in a body. During normal operation the axis of the bore is approximately vertical, so that the mass rests at the bottom. A magnet is positioned adjacent the top of the bore and imparts an upwards force on the mass that is less than the downwards force on the mass upwards force on the mass that is less than the downwards force on the mass from gravity. A coil is positioned adjacent the bottom of the bore. When the body is dropped, or tilted beyond a critical angle from vertical, the force from the magnet causes the mass to move upwards in the bore. The upwards movement is sensed as a change in the coil's inductance.

Motion and tilt angle sensor

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Boulder, CO, United States of America

Paul J Poisson