Eth Zurich

Oerlikon Surface Solutions Ag, Pfaffikon

Empa

Paul Heinrich Böttger

Matthias Lukas Sobiech

Valery Shklover

Sebastian Stein

Jörg Patscheider

A hard material layer system with a multilayer structure, comprising alternating layers A and B, with A layers having the composition MeONin atomic percent and B layers having the composition MeONin atomic percent, where the thermal conductivity of the A layers is greater than the thermal conductivity of the B layers. Meand Meeach comprise at least one metal of the group Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, and Al, pindicates the atomic percentage of Meand pindicates the atomic percentage of Meand the following is true: P=P, nindicates the oxygen concentration in the A layers in atomic percent and nindicates the oxygen concentration in the B layers in atomic percent and the following is true: n&#x3c;n, and mindicates the nitrogen concentration in the A layers in atomic percent and mindicates the nitrogen concentration in the B layers in atomic percent and the following is true: p/(n+m)=p/(n+m).

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Zurich, Switzerland

Paul Heinrich Böttger