Honeywell International Inc.

Alliedsignal Inc.

Honeywell Int'l Inc.

Paul H Collins

Steven A Foote

J Christopher Milne

Ronald B Leonardson

Graeme A Blake

An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.

Pyramid socket suspension

A method for designing double-ended tuning fork (DETF) sensors such that the second-order non-linearity of a first DETF and of a second DETF substantially cancel.

Trim balancing of second-order non-linearity in double ended tuning fork resonators

A method for designing a sensor using a dual double-ended tuning forks which provides composite cancellation of second-order non-linearity terms.

Compensation of second-order non-linearity in sensors employing double-ended tuning forks

A double-ended tuning fork (DETF) sensor having one or more mass balance tabs for equalizing second-order, K2, non-linearity terms between two DETFs, and methods for manufacturing the same.

Growing community of inventors

Issaquah, WA, United States of America

Paul H Collins