Applied Materials, Inc.

Varian Semiconductor Equipment Associates, Inc.

Other

Accretech Usa, Inc.

Paul Forderhase

Charles T Carlson

William Tyler Weaver

Julian G Blake

Juan Carlos Rocha-Alvarez

Jeffrey C Hudgens

Jason M Schaller

Benjamin B Riordon

Robert Brent Vopat

Paul Zachary Wirth

Dmitry A Dzilno

James D Strassner

Paul E Pergande

Aaron Webb

Satish Sadam

Hillman Bailey

Gary Wyka

Siming Lin

Mitchell DiSanto

Michael Carrell

Siva Chandrasekar

Michael D Robbins

Venkata Raghavaiah Chowdhary Kode

Ju Jin

Vishal Verma

Zhiyan Huang

Dursun Moore

A heater assembly that that is effective at maintaining heating lamps at acceptable temperatures is disclosed. The heater assembly utilizes radiative heat transfer to transfer unwanted heat buildup in the heating lamps to a cooling base. One or more high emissivity films are disposed between the heating lamps and the cooling base to facilitate heat transfer. Further, a reflective coating is applied to a portion of the heating lamps to reflect heat away from the cooling base. The heater assembly may be utilized in a high vacuum environment as it does not rely on convective cooling.

Active cooling of quartz enveloped heaters in vacuum

Substrate transfer structure

Embodiments herein disclose a de-coupled substrate lift mechanism installation bracket and method of adjusting a plane of a lift pin hoop of the substrate lift mechanism. In one embodiment an apparatus for making adjustments about two remote axes includes a first adjustment mechanism and a second adjustment mechanism. The first adjustment mechanism includes a common member, one or more first side members, a connector member, and a plurality of first joints pivotably coupling the common member, the one or more first side members, and the connector member. The second adjustment mechanism includes a first body having the common member, one or more second side members, a first frame member, and a plurality of second joints pivotably coupling the common member, the one or more second side members, and the first frame member.

Two axis goniometer to accomplish fine, permanent, calibration of lift pin hoop orientation

An ion implanter and method for facilitating expeditious performance of maintenance on a component of the ion implanter in a manner that reduces downtime while increasing throughput of the ion implanter. The ion implanter includes a process chamber, a transfer chamber connected to the process chamber, a first isolation gate configured to controllably seal the transfer chamber from the process chamber, and a second isolation gate configured to controllably seal the transfer chamber from an atmospheric environment, wherein a component of the ion implanter can be transferred between the process chamber and the transfer chamber for performing maintenance on the component outside of the process chamber. Performing maintenance on a component of the ion implanter includes the steps of transferring the component from the process chamber to the transfer chamber, sealing the transfer chamber, venting the transfer chamber to atmospheric pressure, an opening the transfer chamber to an atmospheric environment.

Transfer chamber and method of using a transfer chamber

A composite end effector including a lower sandwich panel having a first side and a second side opposite the first side, an upper sandwich panel having a first side and a second side opposite the first side, wherein the first side of the upper sandwich panel is bonded to the first side of the lower sandwich panel, and an intermediate element disposed between the second side of the lower sandwich panel and the second side of the upper sandwich panel. The intermediate element may include an electrical conductor, wherein an electrostatic chuck is electrically coupled to the electrical conductor through an aperture in the upper sandwich panel. Alternatively or additionally, the intermediate element may include a pair of optical fibers disposed within a pair of channels formed in at least one of the first side of the upper sandwich panel and the first side of the lower sandwich panel.

Composite end effector and method of making a composite end effector

Techniques for handling media arrays are disclosed. The techniques may be realized as a system for handling a plurality of substrates. The system may comprise a plurality of row elements for supporting the plurality of substrates, wherein the plurality of row elements may be operable to change configuration of the substrates from open configuration to a high-density configuration, where a distance between adjacent substrates in the open configuration may be greater than a distance between the adjacent substrates in the high-density configuration.

Techniques for handling media arrays

A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.

Automatic wafer edge inspection and review system

An auxiliary power system for a bicycle having a motor () attached to the bicycle flame () by thin clamps (), which can be arranged in a variety of positions to avoid disturbing the control cables. Power is delivered on demand via a sprocket driving a single freewheel () attached to a modified left crank (). The gearbox () may be attached to the frame by means of a quick-release system. A bushing (), (), () may be used instead of a modified as a means of mounting the freewheel to the crank axle. (), (), (). To prevent accidental simultaneous braking and triggering, triggering the system is accomplished by placing the trigger switch () so that the rider's fingers must disengage the brake in order to engage the motor. Accidental triggering may be prevented by placing a trigger switch on each handle and wiring them in series so that both switches must be engaged to obtain power.

Motorized bicycle drive system using a standard freewheel and left-crank drive

Growing community of inventors

Austin, TX, United States of America

Paul Forderhase