Robert Boschgmbh

Paul Farber

Gerhard Lammel

Ingo Herrmann

Ulrich May

Franz Laermer

Christoph Schelling

Hubert Benzel

Ando Feyh

Simon Armbruster

Silvia Kronmueller

Peter Schmollngruber

Ralf Reichenbach

Matthias Illing

Henrik Siegle

Hartmut Kittel

Johannes Classen

Frank Schatz

Stefan Weiss

Christian Bauer

Fouad Bennini

Christian Bierhoff

Christian Patak

Birgit Vogelgesang

An apparatus for measuring a magnetic field is described, which comprises a core and an exciter coil for remagnetizing the core material. The remagnetizable core material is embodied as a layer or as multiple layers disposed at a distance from one another, and the core has a maximum total extension G where 2.5 mm&#x2267;G&#x2267;0.2 mm, a ratio of length to width that is greater than or equal to a value of twenty, and a thickness D where 2 &#x3bc;m&#x2267;D&#x2267;0.2 &#x3bc;m. Also described is a corresponding method for measuring a magnetic field.

Apparatus and method for measuring magnetic fields

An expansion of the functional scope of a hybrid integrated component including an MEMS element, a cap for the micromechanical structure of the MEMS element, and an ASIC element having circuit components is provided. In this component, the circuit components of the ASIC element interact with the micromechanical structure of the MEMS element. The MEMS element is mounted on the ASIC element in such a way that the micromechanical structure of the MEMS element is situated in a cavity between the cap and the ASIC element. The ASIC element is additionally equipped with the circuit components of a magnetic sensor system. These circuit components are produced in or on the CMOS back-end stack of the ASIC element. The magnetic sensor system may thus be implemented without enlarging the chip area.

Hybrid integrated component and method for the manufacture thereof

A method for producing a silicon substrate, including the steps of providing a silicon substrate having an essentially planar silicon surface, producing a porous silicon surface having a plurality of pores, in particular having macropores and/or mesopores and/or nanopores, applying a filling material that is to be inserted into the silicon, which has a diameter that is less than a diameter of the pores, inserting the filling material into the pores and removing the excess filling material form the silicon surface, if necessary, and tempering the silicon substrate that is furnished with the filling material that has been filled into the pores, at a temperature between ca. 1000&#xb0; C. and ca. 1400&#xb0; C., in order to close the generated pores again and to enclose the filling material.

Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type

A method for manufacturing a semiconductor structure is provided which includes the following operations: supplying a crystalline semiconductor substrate, providing a porous region adjacent to a surface of the semiconductor substrate, introducing a dopant into the porous region from the surface, and thermally recrystallizing the porous region into a crystalline doping region of the semiconductor substrate whose doping type and/or doping concentration and/or doping distribution are/is different from those or that of the semiconductor substrate. A corresponding semiconductor structure is likewise provided.

Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure

A magnetic sensor system () is provided that contains sensor elements () that are sensitive to magnetic fields, the electrical properties of said sensor elements being modifiable according to a magnetic field that can be influenced by a mobile, passive transmitter element (). The magnetic sensor system () includes two sensor elements () in a gradiometer system, each of which is assigned to one of two permanent magnets () having a predetermined separation. In terms of their dimensions, separation and position relative to the sensor elements (), the permanent magnets () are located such that the offset of the output signal of the sensor elements () is minimized in the gradiometer system.

Magnetic sensor system

A GMR sensor element is proposed, having a rotationally symmetrical positioning of especially eight GMR resistor elements which are connected to each other to form two Wheatstone's full bridges. This GMR sensor element is especially suitable for use in an angle sensor for the detection of the absolute position of the camshaft or the crankshaft in a motor vehicle, particularly in the case of a camshaft-free engine having electrical or electrohydraulic valve timing, of a motor position of an electrically commutated motor, or of detection of a windshield wiper position, or in the steering angle sensor system in motor vehicles.

GMR sensor element and its use

A magnetoresistive sensor element is provided, having a magnetoresistive layer system which, in top view, is at least regionally striated. The sensor element operates on the basis of the GMR effect and is constructed according to the spin valve principle, the striated layer system featuring a reference layer having a direction of magnetization substantially uninfluenced by a direction of an outer magnetic field acting on it. During operation, the sensor element provides a measuring signal which changes as a function of a measurement angle between the component of the field strength of the outer magnetic field lying in the plane of the layer system, and the direction of magnetization, and from which this measurement angle is able to be ascertained. In addition, observed in a top view of the striated layer system, the angle between the direction of magnetization in the absence of the outer magnetic field and the longitudinal direction of the striated layer system is set in such a way that in response to an influence of the outer magnetic field having a defined field strength, which is selected from a predefined work interval, the angle error of the layer system, as a function of this angle and the field strength, is minimal.

Magnetoresistive sensor element and method for reducing the angular error of a magnetoresistive sensor element

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Stuttgart, Germany

Paul Farber