Applied Materials, Inc.

Paul Exline

Dmitry Lubomirsky

Senh Thach

Yeuk-Fai Edwin Mok

Danny D Wang

Dennis Koosau

A semiconductor wafer processing apparatus, and more specifically, a semiconductor substrate support pedestal having a substrate support, an isolator, and first and second heat transfer plates for providing a controllable, uniform temperature distribution across the diameter of a semiconductor wafer. A semiconductor wafer placed upon the pedestal is maintained uniformly at a predetermined temperature by heating the wafer with one or more electrodes embedded within the substrate support and cooling the wafer with a fluid passing through the first and second heat transfer plates.

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Santa Clara, CA, United States of America

Paul Exline