3m Innovative Properties Company

Paul E Rajtar

Frederick E Behr

Michael J Parent

Lawrence A Zazzera

Lawrence A Zazerra

John G Owens

Billy Lee Weaver

Silva K Theiss

Azeotrope-like compositions comprising CFCF(OCH)CF(CF)(1,1,1,2,2,3,4,5,5,5-decafluoro-3-methoxy-4-trifluoromethyl-pentane) and an organic solvent, and uses thereof, are described.

Azeotrope-like compositions and their use

A homogeneous non-aqueous composition containing a fluorinated solvent, ozone, and optionally a co-solvent and the use of these compositions for cleaning and oxidizing substrates is described.

Fluorinated solvent compositions containing ozone

A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and an optional co-solvent, and the use of these compositions for etching of microelectromechanical devices is described.

Fluorinated solvent compositions containing hydrogen fluoride

A homogeneous non-aqueous compositions containing a fluorinated solvent, ozone, and optionally a co-solvent and the use of these compositions for cleaning and oxidizing substrates is described.

A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and a co-solvent, and the use of these compositions for cleaning and etching of substrates is described.

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Hugo, MN, United States of America

Paul E Rajtar