Mks Instruments, Inc.

Paul Dozoretz

Youfan Gu

Garry Holcomb

Ole Wenzel

Jeffrey D Kiernan

James M Mueller

Karl Hausmann

Darren Livingston

David C Neumeister

Benjamin Goss

Donald W Higgins

A trimmable heater mat has a plurality of heater mat segments that together comprise a length of the heater mat. Each of the heater mat segments has a segment heater element connected to a power bus for generating heat. One or more of the heater mat segments can be severed from the others and removed from the heater mat to trim the length of the heater mat to a desired length. Heater mat segment boundary indicia on the heater mat indicate locations where one of the heater mat segments can be severed from the other remaining heater mat segments of the heater mat without interfering with the segment heater elements of the remaining heater mat segments or with the connections of the remaining segment heater elements to the power bus.

Trimmable heater

Heater modules are configured for streamlined daisy chain connectivity that includes front end and intermediate daisy chain power injection, water resistant heater assemblies, and shielding. A power injection device is configured with connectivity for insertion of power into heater modules that are in front and intermediate daisy chain positions while enabling data communications between heater modules positioned on opposite sides of the power injection locations.

Streamlined heater assembly with front and intermediate daisy chain power injection, shielding, and water resistant features

A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.

Integrated absolute and differential pressure transducer

A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.

Reactive chemical containment system

A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.

The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.

Vapor delivery system

Trap apparatus and method for removing contaminants from the gaseous effluent flows from chemical vapor deposition chambers and processes by flowing the particle laden gas into an upper chamber of the trap apparatus, imparting additional kinetic energy to the powder particles to enhance separation of the powder particles from the gas, and then flowing the gas, sans the powder particles, out of the trap, while the powder particles fall into and are captured by a lower chamber positioned below the upper chamber and remote from the flowing gas. An impeller positioned in the upper chamber in the inlet path imparts the additional kinetic energy. For some reaction gas systems, an optional reactor with hydrophillic, rotating growth substrates enhance and accelerate growth of solid particles, which are then dislodged from the media, and fed by the flowing gas into the upper chamber for capture as previously described.

Acceleration assisted particle/gas separation system

A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO -rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding function and solid and liquid phase TEOS polymer trapping function.

Apparatus for controlling polymerized teos build-up in vacuum pump lines

A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO,CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO,-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding fuction and solid and liquid phase TEOS polymer trapping function.

Growing community of inventors

Hudson, CO, United States of America

Paul Dozoretz