Intel Corporation

Paul Davids

Bruce A Block

Brandon Barnett

Stephen M Cea

Vivek K Singh

Jun-Fei Zheng

Miriam Ruth Reshotko

Jack Hwang

Karson Knutson

Srinivas B Bollepalli

In an embodiment, light from a single mode light source may be deflected into a low index contrast (LIC) waveguide in an opto-electronic integrated circuit (OEIC) (or 'opto-electronic chip') by a 45 degree mirror. The mirror may be formed by polishing an edge of the die at a 45 degree angle and coating the polished edge with a metal layer. Light coupled into the LIC waveguide may then be transferred from the LIC waveguide to a high index contrast (HIC) waveguide by evanescent coupling.

Efficient light coupler from off-chip to on-chip waveguides

Some embodiments of the present invention include apparatuses and methods relating to pixelated masks for high resolution photolithography.

Pixelated masks for high resolution photolithography

A pair of phase shift photolithography masks and a process for deriving them is described. In one embodiment, the invention includes deriving a complex electric field estimate for an intended pattern to be produced by phase shift photolithography masks, optimizing the complex electric field estimates, generating a first phase shift mask using the real part of the complex electric field estimates, and generating a second phase shift mask using the imaginary part of the complex electric field estimates.

Dual phase shift photolithography masks for logic patterning

According to embodiments of the present invention, an optical waveguide includes a high dielectric constant core material relative to the cladding material. The cladding material has an index of refraction that is adjustable in response to an electrical stimulus.

Optical waveguide having high dielectric constant contrast between cladding and core

An apparatus having a waveguide with a first tapered surface and a photodetector with a second surface shaped to mate with the first tapered surface.

Integrated waveguide photodetector

Flash lamp apparatuses that generate electromagnetic radiation with wavelengths greater than and/or less than a defined range of wavelengths are disclosed.

Flash lamp annealing apparatus to generate electromagnetic radiation having selective wavelengths

A microchip may include an optical clocking system. The optical clocking system may include a ring resonator which multiplies the frequency of light pulses from a light source for use as optical clocking signals and distribution waveguides to distribute the optical clocking signals to different regions of the microchip.

Optical clocking with a ring resonator

Optical waveguide devices having adjustable waveguide cladding wherein the waveguide cladding is adjustable by using an external control or stimulus to change an optical characteristic of the waveguide cladding, e.g., the refractive index of the cladding. Such waveguide devices may be designed to have certain features that are suitable for monolithically integrated opto-electronic devices and systems.

Optical waveguide devices having adjustable waveguide cladding

In an embodiment of the invention, an optical coupler couples light unidirectionally from integrated circuit package to an integrated circuit die. The package has a large waveguide with a waveguide core that has a low index of refraction. The die has a set of very small waveguide cores that have a high index of refraction relative to the index of refraction of the large waveguide core on the package. The waveguide cores with high index of refraction attract light from the waveguide core with the low index of refraction. No light is coupled back into the large waveguide core. Also, the optical mode of the large waveguide on the package is smaller than a subset of waveguide cores on the die. Thus, light is coupled from the package to the die without the waveguide cores having to be tightly aligned with each other.

Package to die optical coupler having high coupling efficiency and alignment tolerance

Waveguide photodetector apparatus and methods employing an optical waveguide having a tapered section, which may be horizontally tapered, vertically tapered, or both. The apparatus also includes a photodetector with an intrinsic region, which in one embodiment may be tapered in a manner corresponding to a horizontal taper of the tapered section. The photodetector is arranged adjacent the tapered section such that the intrinsic region is coupled to the optical waveguide via an evanescent wave of a guided lightwave. The tapered section serves to force energy carried in the guided lightwave from the optical waveguide into the intrinsic region of the photodetector via the evanescent wave, thereby shortening the photodetector length.

Tapered waveguide photodetector apparatus and methods

A waveguide includes a waveguide core that has a bottom surface and a top surface that defines an angle. The waveguide also includes a cladding layer adjacent to the bottom surface. The cladding layer has a thickness equal to or greater than an evanescent tail of a mode to be transmitted along the wave guide core.

Integrated photodevice and waveguide

The present invention comprises a tool for and a method of inspecting a mask used in photolithography to determine errors in phase, amplitude, and pattern edges. An embodiment of the tool comprises a laser source, a polarizing beam splitter, a first shutter, a mask, a second shutter, a quarter wave retarder, a single-mode optical fiber, and a CCD detector array. An embodiment of the method comprises four independent measurements of light intensity, comprising: a pattern of a mask, a diffraction pattern of a reference pinhole, an interference pattern of the mask and the reference pinhole, and an interference pattern of the mask and the reference pinhole with a known phase difference. Calculations are performed to determine phase and amplitude information as a function of location on the mask. The phase and amplitude information is then compared with a design layout of the mask to determine pattern edge information and identify possible defects in the mask.

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Portland, OR, United States of America

Paul Davids