Ateliers Busch Sa

Paul Alers

Jean-Eric Larcher

Jeihong Kim

The present invention relates to a redundant vacuum pumping system () and a pumping method using this system, comprising a primary roots pump (), a first pumping sub-system () and a second pumping sub-system (), wherein the first pumping sub-system () and the second pumping sub-system () are arranged to pump in parallel the gas evacuated by the primary roots pump (), the first pumping sub-system () comprising a first secondary roots pump () and a first positive displacement pump () and a first valve () positioned between the gas discharge outlet () of the primary roots pump () and the gas suction inlet () of the first secondary roots pump (), and the second pumping sub-system () comprising a second secondary roots pump () and a second positive displacement pump () and a second valve () positioned between the gas discharge outlet () of the primary roots pump () and the gas suction inlet () of the second secondary roots pump (). According to the invention, the first pumping sub-system () and the second pumping sub-system () are configured to pump at a same flow rate, and the primary roots pump () is configured to be able to pump at a flow rate F equal to the pumping flow rate of the primary pumping sub-system () plus the pumping flow rate of the secondary pumping sub-system ().

Redundant pumping system and pumping method by means of this pumping system

A pumping installation includes at least one first positive-displacement machine and one second positive-displacement machine, as well as a control module, in which installation a gas is evacuated from an enclosed volume by means of the first positive-displacement machine and/or the second positive-displacement machine. The pumping installation includes at least one control valve controlled by the control module and a pressure sensor for sensing the value of the pressure at the outlet of the first positive-displacement machine and/or a temperature sensor for sensing the value of the temperature at the outlet of the first positive-displacement machine in order to control the flow of gas between the enclosed volume and the outlet of the pumping installation.

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Porrentruy, Switzerland

Paul Alers