Ateq Corporation

Paul A Warkentin

Paul C Allen

Michael L Rieger

Matthew J Jolley

Chris A Michalski

A method and apparatus for providing improved address resolution in a rasterization system. The rasterization system of the present invention comprises a pattern database, a pattern delivery computer, a rasterizer and a radiant energy system in which a plurality of logical passes are made across a substrate to produce photolithographically formed patterns. The plurality of passes use a combination of offset printing techniques and application of energy to photosensitive material at a plurality of intensities to provide improved address resolution.

Rasterization system utilizing an overlay of bit-mapped low address

An apparatus for splitting radiant energy beams produced by a laser or other light source. The apparatus comprises a plurality of mirrors, each aligned to reflect a beam or plurality of beams from one mirror to the next. Each mirror comprises a glass body with a layer of 50% reflective coating and a layer of anti-reflecting coating on one side of the body. A layer of 100% reflective coating is on the other side of the body. A beam is, thus, 50% reflected from the first reflective layer and allowed 50% to pass through the layer. The remainder of the beam is reflected from the 100% reflective layer.

Beam splitting apparatus

A laser pattern generation apparatus particularly suited for semiconductor applications. The laser beam is split into a plurality of beams and modulated with acousto-optic modulators. A rotating mirror having a plurality of facets causes the beam to scan the workpiece.

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Aloha, OR, United States of America

Paul A Warkentin