Massachusetts Institute of Technology

United States of America as Represented by the Secretary of the Air Force

Unaxis USA Inc.

Paul A Maki

Lionel Cooper Kimerling

Kazumi Wada

Chunghsin Lee

Hermann A Haus

Desmond Rodney Lim

Piero Sferlazzo

Kevin Kidoo Lee

Dogan Gunes

Christina Manolatou

Susan C Palmateer

Kenneth J Bures

An optical cavity structure for bending optical signals is provided. The optical cavity structure includes an input port for receiving input optical signals from a first waveguide. The optical cavity structure also includes an interconnecting structure that receives said input optical signals and interconnects said first waveguide to a second waveguide, the interconnecting structure further includes at least four straight edges that orthogonal and of a finite width. The optical cavity structure further includes an output port coupled to the interconnecting structure for providing the second waveguide with the input optical signals. Further, the optical cavity structure may be used to create three dimensional splitter devices and resonators.

Three dimensional high index optical waveguides bends and splitters

A method for fabricating electromagnetic waveguides. The primary expected application is for the formation of dielectric type waveguides suitable for the confinement and guidance of intra-red and visible wavelengths. A secondary application is the formation of waveguides which can be filled with liquids or gases. The method uses standard microelectronic processing techniques.

Damascene optical waveguides

An acousto-optic tunable filter that includes a polarization beamsplitter, a multi-segment interaction region and a polarization beam combiner is described. The polarization beamsplitter generates a first and a second polarized optical signal. The multi-segment optical interaction region includes a first optical interaction region and a first acoustic wave generator that generates acoustic waves in the first optical interaction region. The multi-segment optical interaction region also includes a second optical interaction region that is non-collinear relative to the first optical interaction region and a second acoustic wave generator that generates acoustic waves in the second optical interaction region. Optical signals that are phase-matched to the acoustic waves are mode-converted in response to the acoustic waves. The acousto-optic tunable filter also includes a polarization beam combiner that generates both a mode-converted optical signal and a non-mode-converted optical signal.

Acousto-optic tunable filter with segmented acousto-optic interaction region

A method of etching the surface of a substrate in a closed environment including the steps of contacting the surface of the substrate with a molecular chlorine etching gas, allowing a passivation layer to form on the surface of the substrate with atomic layer precision, and photochemically removing at least a portion of the passivation layer by irradiating the portion without destruction of the layer of material immediately underlying the passivation layer.

Laser bilayer etching of GaAs surfaces

Growing community of inventors

Harvard, MA, United States of America

Paul A Maki