Asml Netherlands B.v.

Patriek Adrianus Alphonsus Maria Bruurs

Marcus Adrianus Van De Kerkhof

Johannes Andreas Henricus Maria Jacobs

Erheng Wang

Martijn Petrus Christianus Van Heumen

Jing Zhang

Vineet Sharma

Makfir Sefa

Shao-Wei Fu

Simone Maria Scolari

Jan-Gerard Cornelis Van Der Toorn

Edwin Cornelis Kadijk

Dennis Herman Caspar Van Banning

Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer; a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.

Fluid transfer system in a charged particle system

A stage apparatus including: an object table configured to hold an object; a positioning device configured to position the object table and the object held by the object table; and a remote temperature sensor configured to measure a temperature of the object table and/or the object, wherein the remote temperature sensor comprises a passive temperature sensing element.

Substrate positioning device with remote temperature sensor

Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer, a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.

Growing community of inventors

Baarle-Nassau, Netherlands

Patriek Adrianus Alphonsus Maria Bruurs