Coherent, Inc.

Patrick T Tracy

Frederick W Hauer

R Russel Austin

Joel Fontanella

Howard L Knickerbocker

Electrical apparatus for connecting a radio frequency power-supply having two outputs to a load includes two radio frequency transmission-lines, each one connected to a corresponding power-supply output. A transformer arrangement connects the two transmission-lines to the load. Each transmission-line includes a series-connected pair of twelfth-wave transmission-line sections. The series-connection between the twelfth wave transmission-line sections in one transmission line is connected to the series-connection between the twelfth-wave transmission-line sections in the other by a device having an adjustable impedance.

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In a COgas discharge laser energized by a radio frequency (RF) power source a transformer having selectively variable output impedance is used to match output impedance of the power source to the impedance of discharge electrodes of the laser. A similar transformer can be used to impose a selective variable phase-shift on the RF power from the source. The variable impedance transformer can also be used for impedance matching between amplifier stages in the power source.

RF power is transmitted to a COgas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of the RF power source to the operating impedance of the laser.

Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections

An RF amplifier circuit includes a MOSFET connected to an RF output of the circuit via an impedance matching network including an inductor and a tuning capacitor connected in parallel with the inductor and the MOSFET. DC voltage is applied to the MOSFET via a series path through a radio frequency choke and the inductor of the impedance matching network.

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Bolton, CT, United States of America

Patrick T Tracy