Elemental Scientific, Inc.

Patrick Sullivan

Daniel R Wiederin

Jae Seok Lee

Kyle W Uhlmeyer

Jacob Unnerstall

Brad Prucha

Charles Derrick Quarles, Jr

Michael Paul Field

Paul Field

Scott Smith

C Derrick Quarles, Jr

Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.

Automatic sampling of hot phosphoric acid for the determination of chemical element concentrations and control of semiconductor processes

Systems and methods are described to provide speciation of silicon species present in a remote sample for analysis. A method embodiment includes, but is not limited to, receiving a fluid sample containing inorganic silicon in the presence of bound silicon from a remote sampling system via a fluid transfer line; transferring the fluid sample to an inline chromatographic separation system; separating the inorganic silicon from the bound silicon via the inline chromatographic separation system; transferring the separated inorganic silicon and bound silicon to a silicon detector in fluid communication with the inline chromatographic separation system; and determining an amount of one or more of the inorganic silicon or the bound silicon in the fluid sample via the silicon detector.

Automated system for detection of silicon species in phosphoric acid

Systems and methods for speciation of chemicals of interest with inline and automatic dilution or addition of other fluids prior to or following speciation with subsequent analysis by ICP instruments are described. A system embodiment includes, but is not limited to, a first valve having a first valve configuration to receive a sample into a holding loop coupled to the first valve and a second valve configuration to transfer the sample from the holding loop; and a second valve having a first valve configuration configured to receive the sample from the first valve and direct the sample to a speciation column to separate one or more species of the sample, the second valve further including a fluid addition port configured to receive a fluid into the second valve to mix with the sample after the sample exits the speciation column.

Inline dilution and autocalibration for ICP-MS speciation analysis

Systems and methods for inline and automatic dilution of chemicals of interest for speciation and subsequent analysis by ICP spectrometry are described. A system embodiment includes a first valve to receive a sample into a holding loop; a plurality of syringe pumps coupled to the first valve to deliver an inline diluted sample from the first valve; and a second valve coupled to the first valve to receive the inline diluted sample from the first valve into a sample holding loop coupled to the second valve, the second valve configured to couple to at least one of an eluent source or a carrier fluid source to receive at least one of an eluent fluid or a carrier fluid to transfer the inline diluted sample from the sample holding loop to a speciation column to separate one or more species from the inline diluted sample.

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Omaha, NE, United States of America

Patrick Sullivan