Kla-tencor Technologies Corporation

University of Oklahoma

Patrick Stevens

Gregory S Horner

Zhiwei Xu

Amin Samsavar

Thomas G Miller

Nilesh Raman Vasan

Rannyu Ngoran

Michael Petri

Jonathan Schick

Andrew Stewart

Derrick Jones

A surgical cleaning tool and method of cleaning a surgical tool. The surgical cleaning tool includes a shaft, a handle and an end portion. The shaft has a distal end and a proximal end. The handle is attached to the distal end of the shaft The end portion is connected to the proximal end of the shaft, wherein the end portion has an outer surface, an inner cavity, an inner surface, at least one cleaning element connected to at least a portion of the inner surface, and an opening in a wall portion of the end portion, wherein the opening allows access to the cleaning element in the inner cavity of the end portion.

Surgical cleaning tool, system, and method

A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage decay of the film. The method may also include determining the property of the film using the charge density, the surface voltage potential, and the rate of voltage decay. A method for determining a thickness of an insulating film is provided. The method may include depositing a charge on the film, measuring a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and measuring a rate of voltage decay of the film. The method may also include determining a thickness of the film using the rate of voltage decay and a theoretical model relating to current leakage and film thickness.

Methods and systems for determining a property of an insulating film

A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage decay of the film. The method may also include determining the property of the film using the charge density, the surface voltage potential, and the rate of voltage decay. A method for determining a thickness of an insulating film is provided. The method may include depositing a charge on the film, measuring a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and measuring a rate of voltage decay of the film. The method may also include determining a thickness of the film using the rate of voltage decay and a theoretical model relating to leakage and film thickness.

Growing community of inventors

Norman, OK, United States of America

Patrick Stevens