Carl-zeiss-smt Ag

Carl Zeiss Smt Gmbh

Patrick Scheible

Christoph Zaczek

Hans-Jochen Paul

Matthias Heller

Harry Bauer

Jens Ullmann

Wolfgang Singer

Heiko Feldmann

Michael Totzeck

Hans-Juergen Rostalski

Paul Graeupner

Alexandra Pazidis

Reiner Garreis

In a projection objective for imaging a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, at least one optical component is provided which has a substrate in which at least one substrate surface is covered with an interference layer system having a great spatial modulation of the reflectance and/or of the transmittance over a usable cross section of the optical component, the modulation being adapted to a spatial transmission distribution of the remaining components of the projection objective in such a way that an intensity distribution of the radiation that is measured in a pupil surface has a substantially reduced spatial modulation in comparison with a projection objective without the interference layer system.

Projection system with compensation of intensity variations and compensation element therefor

An optical component and a coating system for coating substrates for optical components with essentially rotationally symmetric coatings, the system having a planetary-drive system () that has a rotating planet carrier () and several planets (), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks () that allow controlling the radial variation in physical film thickness is arranged between a source () of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (&#x3b2; max) for every substrate also corotate with the primary carrier (), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

Optical component and coating system for coating substrates for optical components

A method for coating substrates () for optical components with essentially rotationally symmetric coatings employs a coating system equipped with a planetary-drive system () that has a rotating planet carrier () and several planets (), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks () that allow controlling the radial variation in physical film thickness is arranged between a source () of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (&#x3b2; max) for every substrate also corotate with the primary carrier (), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

Method and coating system for coating substrates for optical components

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Aalen, Germany

Patrick Scheible