Analogic Corporation

Axcelis Technologies, Inc.

Patrick Richard Splinter

Steven Dana Weed

Bo H Vanderberg

Michael A Graf

Yongzhang Huang

Manny Sieradzki

John Zheng Ye

Matthew Hanlon

Santosh Arcot

Victor M Benveniste

Daniel R Tieger

Joseph Ferrara

Ronald Elwin Swain

Brian S Freer

Christopher Godfrey

David Tao

Sevag Minas Zoboyan

David Gino Vacca

Que Weiguo

John Francis Grant

Steven Urcuk

Kevin Brennan

William Davidson

One or more techniques and/or systems described herein provide a power coupling device, such as may be used to transfer power between a stator and a rotor. The power coupling device includes a support structure defining an opening. The power coupling device includes a core element including a ferrite material. The core element is received within the opening of the support structure. The core element defines a core channel. The power coupling device includes an inductive element that is received within the core channel. The power coupling device includes an attachment structure removably attached to the support structure. The attachment structure attaches the core element to the support structure. The core element is disposed between the support structure and the attachment structure.

Power coupling device

Scanning systems may include a stator, a rotor supporting at least one radiation source and at least one radiation detector rotatable with the rotor, and a motivator operatively connected to the rotor. The stator, the rotor, the at least one radiation source, and the at least one radiation detector may be located within a housing. A conveyor system may extend through the housing and the rotor. A shielding system including a series of independently movable energy shields sized, shaped, and positioned to at least partially occlude a pathway along which the conveyor system extends may extend from an entrance to the housing, through the rotor, to an exit from the housing. A control system may be configured to cause the shielding system to automatically and dynamically move individual energy shields in response to advancement of one or more objects supported on the conveyor system.

Scanning systems with dynamically adjustable shielding systems and related methods

Among other things, a radiation system is provided. The radiation system includes a stationary unit and a rotating unit that rotates about an axis relative to the stationary unit. A radiation source and a detector array are mounted to the rotating unit. A wheel mechanism at least partially supports the rotating unit and facilitates rotation of the rotating unit relative to the stationary unit. A lift unit is supported by the stationary unit and engages the rotating unit. When the lift unit is in a lowered position, the rotating unit is supported by the wheel mechanism and the lift unit is spaced a distance apart from the rotating unit. When the lift unit is in a raised position, the rotating unit is supported by the lift unit and the rotating unit is spaced a second distance apart from the wheel mechanism.

Wheel and lift unit for radiation imaging modalities

Among other things, one or more techniques and/or systems are described for setting a sampling frequency for a radiation imaging system. The radiation imaging system comprises a rotating gantry configured to rotate a radiation source and a detector array about an object to generate an image(s) of the object. A data acquisition system is configured to sample the detector array as views. One or more flag structures are arranged according to a partial arc segment (e.g., a structure less than a full 360 degree circle). One or more sensors are disposed on one of the rotating gantry or a stationary support about which the rotating gantry rotates. When a sensor encounters a flag structure, a current rotational speed of the rotating gantry is determined. A clock frequency is updated based upon the current rotational speed to establish a sampling frequency for the data acquisition system for sampling the detector array.

System and method for sampling frequency adjustment for radiation imaging system

An X-ray inspection system includes at least one display monitor and a console. The console includes at least two different visualization algorithms and a processor. The processor is configured to process volumetric image data with a first of the at least two different visualization algorithms and produce a first processed volumetric image. The processor is further configured to process the volumetric image data with a second of the at least two different visualization algorithms and produce a second processed volumetric image. The processor is further configured to concurrently display the first and second processed volumetric image data via the display monitor. The volumetric image data is indicative of a scanned object and items therein.

Multiple three-dimensional (3-D) inspection renderings

One or more techniques and/or systems are described for generating power on a rotating unit of a system, such as a radiation system (e.g., CT system). The rotating unit comprises a generator that comprises a drive wheel. The drive wheel interfaces with a drive mechanism of a stationary unit. As the rotating unit is moved relative to the stationary unit, the drive wheel rotates along the drive mechanism causing power to be generated by the generator. The power may be supplied to one or more electronic components of the rotating unit.

Power generation for radiation system

A transport apparatus of an X-ray inspection system includes an inspection region with an entrance and an exit. The transport apparatus further includes a loading region disposed at the entrance of the inspection region, the loading region. The loading region includes a first set of X-ray attenuating curtains and a first curtain mover, which moves the curtains of the first set of X-ray attenuating curtains into and out of the loading region between areas that support objects for inspection. The transport apparatus further includes a conveyor device which moves an object for inspection residing in one of the areas from the loading region to the inspection region for inspection.

X-ray inspection system X-ray radiation shielding curtains

A system and method are provided for implanting ions into a workpiece in a plurality of operating ranges. A desired dosage of ions is provided, and a spot ion beam is formed from an ion source and mass analyzed by a mass analyzer. Ions are implanted into the workpiece in one of a first mode and a second mode based on the desired dosage of ions, where in the first mode, the ion beam is scanned by a beam scanning system positioned downstream of the mass analyzer and parallelized by a parallelizer positioned downstream of the beam scanning system. In the first mode, the workpiece is scanned through the scanned ion beam in at least one dimension by a workpiece scanning system. In the second mode, the ion beam is passed through the beam scanning system and parallelizer un-scanned, and the workpiece is two-dimensionally scanned through the spot ion beam.

Ion implanter having combined hybrid and double mechanical scan architecture

An ion implantation system comprising an ion source configured to generate an ion beam along a beam path, a mass analyzer is located downstream of the ion source wherein the mass analyzer is configured to perform mass analysis of the ion beam and a beam complementary aperture located downstream of the mass analyzer and along the beam path, the beam complementary aperture having a size and shape corresponding to a cross-sectional beam envelope of the ion beam.

System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes

Methods for implanting an ionized polyhedral borane cluster or a selected ionized lower mass byproduct into a workpiece generally includes vaporizing and ionizing a polyhedral borane cluster molecule in an ion source to create a plasma and produce ionized polyhedral borane cluster molecules and its ionized lower mass byproducts. The ionized polyhedral borane cluster molecules and lower mass byproducts within the plasma are then extracted to form an ion beam. The ion beam is mass analyzed with a mass analyzer magnet to permit selected ionized polyhedral borane cluster molecules or selected ionized lower mass byproducts to pass therethrough and implant into a workpiece.

Methods for implanting B22Hx and its ionized lower mass byproducts

A method derives a terminal return current or upstream current to adjust and/or compensate for variations in beam current during ion implantation. One or more individual upstream current measurements are obtained from a region of an ion implantation system. A terminal return current, or composite upstream current, is derived from the one or more current measurements. The terminal return current is then employed to adjust scanning or dose of an ion beam in order to facilitate beam current uniformity at a target wafer.

Closed loop dose control for ion implantation

A parallelizing component of an ion implantation system comprises two angled dipole magnets that mirror one another and serve to bend an ion beam traversing therethrough to have a substantially 's' shape. This s bend serves to filter out contaminants of the beam, while the dipoles also parallelize the beam to facilitate uniform implant properties across the wafer, such as implant angle, for example. Additionally, a deceleration stage is included toward the end of the implantation system so that the energy of the beam can be kept relatively high throughout the beamline to mitigate beam blowup.

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Kingston, MA, United States of America

Patrick Richard Splinter