Waveguide Solutions, Inc.

Patrick Moyer

Faramarz Farahi

Ramazan Benrashid

Leilabady Pedram

Pascal Dupriez

The subject invention relates to the fabrication of micro-optical structures in a glass-like transparent material using conventional photolithography processing steps. The glass-like material is a spin-on glass (SOG) material, which behaves like a negative-tone photoresist, and has high quality optical properties similar to those of glass. The present invention can take advantage of gray scale photomasks to illuminate the uncured spin-on material with various illumination intensities, thus resulting in variations in resultant film thickness of the SOG material after the chemical development step. This results in micro-optical structures that can be fabricated with the desired shapes, depending on the transmission characteristics of each region of the gray scale photomask.

Gray scale fabrication method using a spin-on glass material and integrated optical designs produced therefrom

The present invention claims a unique way to pattern an optical microstructure immediately on top of a mass produced light-emitting device, such as a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or a photo detector, for the purpose of efficient coupling of light to or from the active region of the light-emitting device. The invention addresses the need to effectively and efficiently extract light from the light-emitting optoelectronic device. Finally, the invention allows for the optical microstructure to be deposited and patterned directly over the light-emitting device contained on a suitable substrate, such as a wafer.

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Charlotte, NC, United States of America

Patrick Moyer