Cymer, Inc.

Patrick L Nelissen

Richard L Sandstrom

Daniel J W Brown

Matthew Graham

Robert P Akins

Kevin Weimin Zhang

A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.

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Ramona, CA, United States of America

Patrick L Nelissen