Horiba Stec, Co., Ltd.

Patrick Allen Lowery

Tadahiro Yasuda

John Thomas Dick

Maximilian Martin Gundlach

Thomas Hoke

William W White

Ryan Owens

Edward Cocciadiferro

Michael Kramer

Tomohiro Yoshida

Bill White

Andrew Wayne Price

Brian James Ebert

Tyson Stephenson

A flow ratio controller system includes an inlet receiving a total inlet fluid flow from one or more inlet channels, distribution channels fluidically connected to the inlet and arranged in parallel in a branching flow path downstream of the inlet, and a controller. The distribution channels includes a hybrid distribution channel. The controller selectively operates in alternative control modes including a flow verification control mode and a flow ratio control mode. In the flow verification control mode, the controller calculates a calibrated value for a reference volume using measurements from a mass flow meter in the hybrid distribution channel, then calculates a target channel calibration value for the mass flow meter in the target distribution channel. In the flow ratio control mode, the controller controls each of the distribution channels, including the hybrid channel, according to a respective flow ratio setpoint for each distribution channel.

Flow ratio controller system operating in alternative control modes

A hybrid flow ratio controller system is provided, which includes an inlet configured to receive a total inlet fluid flow and three or more distribution channels. Each of the three or more distribution channels has a respective variable flow control valve and carries a respective portion of the total inlet fluid flow. The hybrid flow ratio controller further includes a controller operatively coupled to the respective variable flow control valves. The controller is configured to control a flow rate of at least a first distribution channel according to a predetermined flow ratio of the inlet fluid flow in accordance with a flow ratio control mode, to control a flow of at least a second distribution channel in either a flow rate control mode or a pressure control mode, and to control a third distribution channel in an overflow mode.

Hybrid flow ratio controller system with channels for flow ratio control, flow rate or pressure control, and overflow control

A rate-of-change flow measurement device is provided including first pressure sensor, a position control valve with a valve position sensor, a second sensor position and a chamber comprising a part of the flow path of the device, and an isolation valve, arranged in this order along the flow path of the device. The device receives valve position data from the valve position sensor and pressure data from the pressure sensors, and calculates a volume of the chamber at least in part using the valve position data when a calibration of a device-under-test is performed by decreasing a pressure of the chamber or increasing the pressure of the chamber while opening the position control valve to maintain the pressure reading of the first pressure sensor constant to stay at a pressure set point.

Rate-of-change flow measurement device

A gas delivery system is provided comprising an electrical backplane, a system controller operatively coupled to the electrical backplane, and a plurality of mass flow controllers. Each mass flow controller includes respective mass flow control circuitry operatively coupled to the electrical backplane. The system controller and each mass flow control circuitry are physically mounted on the electrical backplane. The gas delivery system further comprises a pump/purge system to help eliminate pressure build up in the system and provide a quick stop to a flow process in the system. Accordingly, a row associated with a flow process may be evaluated so that a mass flow controller may be swapped out as needed.

Gas delivery system with electrical backplane

A mass flow controller, including a block body having a flow path and a valve provided at least in part within the flow path. The mass flow controller may further include a valve position sensor, a first temperature sensor, a first pressure sensor located on an upstream side of the flow path from the valve, and a second pressure sensor located on a downstream side of the flow path from the valve. The mass flow controller may further include a processor configured to receive valve position data, first temperature data, first pressure data, and second pressure data. The processor may be further configured to estimate a flow rate of fluid in the flow path at least in part by applying a trained machine learning model to the valve position data, the first temperature data, the first pressure data, and the second pressure data.

Flow rate estimation for mass flow controller

A calibration data generation apparatus includes a flow rate sensor that measures the flow rate of a fluid flowing through a fluid control valve; a differential pressure control mechanism; a temperature control mechanism; and a control unit that when the fluid passing has sound velocity, uses the temperature control mechanism to change the temperature from a reference temperature to comparative temperature. In addition, the control unit includes a valve opening control part that controls the fluid control valve so that at the comparative temperature, an output value outputted from one of the position sensor and the flow rate sensor becomes equal to the reference output value of the one; and a calibration data generation part that generates the calibration data on the basis of a calibration data generation output value outputted from the other one of the position sensor and the flow rate sensor.

Calibration data generation apparatus, calibration data generation method, and flow rate control device

A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.

Flow rate ratio control device with flow velocity control mode

Provided is a fluid control device that achieves high sealing performance at full closure, and can suppress damage to a valve body or a valve seat surface even without mechanical accuracy improvements. The fluid control device includes: a fluid control valve provided in a flow path through which fluid flows: and a control mechanism that controls the fluid control valve. The fluid control valve includes: a valve seat surface; a valve body that contacts and separates from the valve seat surface; and an actuator that drives the valve body. Further, the control mechanism includes a speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and the valve seat surface and the valve body reach a predetermined distance apart, reduces the moving speed of the valve body more than before reaching the predetermined distance.

Fluid control device, recording medium recorded with control program, and control method

Provided is a flow rate control apparatus that includes a flow restrictor, a downstream side valve, a downstream side pressure sensor, first and second flow rate calculators, and a flow rate controller. The downstream side valve is disposed downstream of the flow restrictor in a flow path. The downstream side pressure sensor measures a pressure between the flow restrictor and the downstream side valve. The first flow rate calculator calculates a first flow rate of fluid flowing through the flow restrictor. The second flow rate calculator calculates a second flow rate of fluid flowing out of the downstream side valve on the basis of the first flow rate and the temporal variation in downstream side pressure measured by the downstream side pressure sensor. The flow rate controller controls the downstream side valve on the basis of a set flow rate and the second flow rate.

Flow rate control apparatus, flow rate control method, and program recording medium

A micro-position gap sensor assembly, including a structural housing, a flexible diaphragm fixedly attached at a first end of the structural housing, and a shaft orthogonally attached to the flexible diaphragm. The micro-position gap sensor assembly may further include a first retainer coupled to the shaft, a second retainer formed as a step of the structural housing, and a plate gap sensor. The plate gap sensor may include a non-contact sensor plate biased by a compression spring so that the non-contact sensor plate is held against a portion of the second retainer. The plate gap sensor may further include a target plate positioned adjacent the non-contact sensor plate and separated therefrom by a gap. The target plate may be biased by a return spring so that the target plate is held against a portion of the first retainer. The target plate may be coupled to the shaft.

Micro-position gap sensor assembly

A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.

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Reno, NV, United States of America

Patrick Allen Lowery