Stmicroelectronics S.a.

Pascal Decamps

Andre Rochet

Daniel Gardellin

Andr&eacute; Rochet

A carrier of semiconductor wafer transportation. The carrier comprising: a base; two or more walls mounted to the base, with a plurality of grooves for receiving wafers by lateral insertion thereinto through a mouth, the mouth defined by an upper wall and a substantially horizontal lower wall, wherein the groove comprises a closed end defined by a back wall joined to the upper wall and the lower wall so that the groove narrows from the mouth towards the closed end, the upper wall being slanted upward towards the mouth and the back wall being slanted towards the mouth in the region close to the horizontal wall.

Semiconductor wafer carrier with grooves

The invention relates to a dimensional control device for semiconductor wafer transport cassettes. Each cassette has a base from which extend vertical walls including horizontal grooves designed to receive wafers by lateral insertion. The device includes a seat provided with positioning guides of a cassette base; switches placed on the seat so that the actuation of all the switches by the positioned base indicate a suitable planarity of the base; a drawer mounted slidably on the seat so as to be engageable in the cassette in the insertion direction of the wafers, and having at least one template corresponding to a high position groove of the cassette; and a stop placed on the seat, at the side opposite to the drawer with respect to the cassette, to cause a tilting of the cassette when the drawer is moved towards the cassette and the template does not correspond to the cassette.

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Meylan, France

Pascal Decamps