Applied Materials, Inc.

Parris C M Hawkins

James Robert Moyne

Jimmy Iskandar

Jianping Zou

Charles Q Huang

Yueh-Shian Chi

Krishna Vepa

Andreas Neuber

Badri N Krishnamurthy

Qiaolin Jin

Yuehshian T Chi

M'hamed Farid Bakli

Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining a relationship between tool parameter settings for the manufacturing tool and the test substrate data. The method further includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool to reduce maintenance recovery time and to reduce requalification time.

Methods and systems for applying run-to-run control and virtual metrology to reduce equipment recovery time

Described herein are methods, apparatuses, and systems for reducing equipment repair time. Disclosed methods include collecting data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility. Disclosed methods include determining a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The disclosure includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a tool parameter adjustment for at least one target parameter for the at least one manufacturing tool. The disclosure further includes applying the R2R control modeling to obtain tool parameter adjustments for at least one manufacturing tool.

A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning.

Process tool chemical and gas usage optimization

A system, method and medium of sending messages in a distributed data processing network is described, and contemplates receiving a message that includes subject information that is generated based on one or more pre-selected portions as the message is generated. A message delivery system in a client-server environment is also described. The message delivery system includes a server configured to receive a message that includes subject information that is generated based on one or more pre-selected portions as the message is created and configured to forward the message based on the subject information.

Dynamic subject information generation in message services of distributed object systems

Methods and systems for integrating manufacturing equipment with factory automation software. In one embodiment, an equipment integrator (EI) has a user interface to facilitate user input of configuration information to provide an adaptable interface between a manufacturing tool and a manufacturing execution system (MES) that is operable over a plurality of manufacturing tools. The user configurable interface of the EI is adaptable so that tool-independent MES data collection requests may be satisfied by tool-specific data publication through the EI. In a further embodiment, data collected by the EI from a particular manufacturing tool is mapped to the MES without tool-specific interface coding. During processing, the configurable EI may fill a request from the MES for manufacturing data by collecting a data from the manufacturing tool, identifying data based on the configuration information and returning data satisfying a data keying criterion defined in the MES.

Configuration based engineering data collection (EDC) for manufacturing lines

Dynamic subject information generation in message services of distributed object systems in a semiconductor assembly line facility

Systems, methods and mediums are provided for automating experiments within an automated environment without the need to disassociate the test subject (e.g., the semiconductor chip or chips) from that environment. An 'experiment' may be a pre-planned deviation of an established (e.g., pre-defined) process utilizing the automated environment. A computer-implemented method, system and computer-readable medium for managing experiments, such as those relating to semiconductor technology. An experiment order includes some deviation from a base process capable of operating in an automated environment. An approval of the experiment order is obtained from a distribution list of users, while permitting the users to attach documents to the experiment order or perhaps modify the experiment. The experiment order is translated into processing data suitable for implementation by said automated environment, and stored. The experiment is caused to be executed in conjunction with at least some portion of said base process via the automated environment according to the processing data.

Experiment management system, method and medium

Generic interface adapter builder software generates an interface adapter to tie tools into a centralized manufacturing execution system. As contemplated by embodiments of the present invention, the interface adapter allows a tool in a semiconductor manufacturing assembly to communicate with other hardware and software in the centralized manufacturing execution system in accordance with a standard protocol and be operable from a common view graphical user interface. The generic interface builder software uses a classification of the type library and desired parameters for a particular tool to generate the interface adapter that maps the interface methods of the tool to the interface of the manufacturing execution system and handles long running service request support. In one aspect of the invention, the tool to be integrated into the manufacturing assembly may be a material control system. As contemplated by embodiments of the present invention, the material control system uses COM-based interface methods, and may optionally include a COM-based protocol converter, and may expose its interface methods via a type library.

Growing community of inventors

Los Altos, CA, United States of America

Parris C M Hawkins