Massachusetts Institute of Technology

Harvard College

Parag Deotare

Vladimir Bulovic

Timothy Manning Swager

Hae-Seung Harry Lee

Jeffrey Hastings Lang

Marko Loncar

Ellen May Sletten

Apoorva Murarka

Trisha L Andrew

Farnaz Niroui

Annie I-Jen Wang

Qimin Quan

Matthew Eric D'Asaro

Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions.

Electromechanical device

An on-chip integrated nanobeam cavity array spectrometer (INAS) having an array of waveguide-coupled nanobeam cavities. Waveguide splitters are used to bring the signal from the input waveguide into each cavity. The spectrum of unknown input signal is obtained by collecting signal from each nanobeam cavity in the array.

Integrated nanobeam cavity array spectrometer

Growing community of inventors

Medford, MA, United States of America

Parag Deotare