Gudeng Precision Industrial Co., Ltd.

Other

Pao-Yi Lu

Chin-Ming Lin

Chen-Wei Ku

Ming-Chien Chiu

Jain-Ping Sheng

Ming-Long Chiu

Cheng-Ju Lee

Shao-Wei Lu

Kuo-Chun Hung

Tien-Jui Lin

Sheng-Hung Wang

Chien-Feng Wang

Ming-Lung Chiu

Kun-Hong Liao

Chih-Ching Chiu

Jain-Pin Sheng

Kuo Chun Hung

Ke-Chih Chien

The present invention relates to a reticle pod having gas guiding apparatus. The gas guiding apparatus communicates with at least an inlet of the reticle pod and comprises a first outlet corresponding to a first gas flowing space of the reticle pod and a second outlet corresponding to a second gas flowing space. When the inlet supplies a high-purity gas to the gas guiding apparatus, the high-purity gas will flows through the gas guiding apparatus, and flow to the first and second gas flowing spaces via the first and second outlets, respectively to distribute uniformly in the first and second gas flowing spaces. In addition, the cleaning efficiency on the reticle is improved; the contact between the reticle and air can be avoided for protecting the reticle. Thereby, the usage of the high-purity gas is reduced, and the filling efficiency of the high-purity gas is enhanced.

Reticle pod having gas guiding apparatus

A transmission box using AMHS for transferring reticle pod is provided, wherein an OHT (Overhead Hoist Transfer) system is disposed on the transmission box to perform mechanical transferring of the reticle pod for greatly reducing risks of damaging reticles caused by operators when transferring, streamlining the allocation of operators, and thus decreasing the time needed for process to complete.

Transmission box for reticle POD

A reticle pod with drain structure comprises an outer container and an inner container, wherein an upper cover of inner container is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer container are used to press the retainers for fastening and stabilizing the reticle in the inner container and thus ensuring safety and stability of the reticle in the reticle pod. Collision risks of the reticle in the reticle pod due to vacillation of reticle pod during transportation can be reduced. Cost of reticles also can be greatly decreased. Further, a plurality of drain holes is disposed on a lower cover of the outer container for draining the remained water in the outer container. It will be done without disassembling the lower cover of outer container for reducing the contamination opportunity in the pod and preventing from wasting of labor and time for disassembling.

Reticle pod with drain structure

EUV pod

A wafer container, comprising: a container body, the container body having a plurality of slot portions on two opposite sidewalls of the interior of the container body for horizontally sustaining a plurality of wafers, each slot portion having a horizontal carrying portion, an opening being formed on one side of the container body for exporting and importing a plurality of wafers; and a door, said door having an inner surface and a outer surface, the inner surface being joined with the opening of the container body for protecting the plurality of wafers therein, the characteristic in that: an elasticity module is disposed on the inner wall of the rear end of the container body opposite to the opening, the elasticity module having a rectangular body and a convex portion bending toward the interior of the container body being respectively formed on two longer opposite sides of the rectangular body.

Wafer container with elasticity module

A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.

FOUP and robotic flange thereof

The present invention provides a temperature and humidity measuring and recording device deployed on substrate for measuring and recording temperature and humidity of the interior of any station for reticles and of any SMIF POD. The temperature and humidity measuring and recording device comprises a substrate with a first surface and a second surface opposite to the first surface on another side of the substrate, a first measurement unit embedded in and fixed to the first surface of the substrate for measuring the temperature and humidity of the surrounding environment, and a second measurement unit embedded in and fixed to the second surface of the substrate for measuring the temperature and humidity of the interior between the substrate and the pellicle film.

Temperature and humidity measuring device deployed on substrate

A reticle storing container is disclosed to include an outer container, an inner container, and a purging valve. The outer container comprises a container body and a container base on which at least a first through-hole is disposed, and a first inner space is formed between the container body and the container base for storing the inner container. The inner container comprises a top cover and a bottom base on which at least a second through-hole connected to the first through-hole is disposed, and a second inner space is formed between the top cover and the bottom base for storing a reticle. The purging valve is disposed in the first through-hole on the outer container base and connected to the second through-hole of said inner container, wherein the purging valve comprises a spring and a valve part. Thus, when the valve part is propped up by a purging head, the valve part compresses the spring for the purging valve to be connected to the purging head. And a filter material is disposed on the joint portion between the container body and the container base to prevent the interior of the reticle from being contaminated.

Reticle storing container

A wafer container includes a container body and a door joined with opening of the container body for protecting wafers therein. At least one latch component is disposed in the door, and each latch component includes an oval cam and a pair of moving bars, a first end of each moving bar connecting to one of the two opposite sides of the oval cam and a second end of each moving bar having a guiding structure, a pair of moving grooves being disposed between the first end and the second end of each moving bar, at least a pair of rollers being disposed on the door and each roller being embedded in each moving groove of moving bar, and a locating spring being formed as an integral part of the moving bars.

Wafer container with at least one oval latch

The present invention relates a sealing apparatus with interlocking air inflation device for wafer carrier and a sealing method thereof, wherein the sealing apparatus is disposed between a wafer container and a cover of a wafer carrier, used for sealing the cover and the wafer container when the cover is closed to the wafer container. The sealing apparatus comprises: at least one latch set, at least one interlocked cam, an air inflation sealing member, and at least one air intake/outtake valve, wherein the interlocked cam is adopted for connecting an interlocking device having an air inflation member, and the interlocking device can be used to drive the interlocked cam for making the latch set bolt the cover and the wafer container, and inflate the air inflation sealing member through the air inflation member thereof and the air intake/outtake valve in order to inflate and expand the air inflation sealing member.

Sealing apparatus with interlocking air inflation device for wafer carrier

An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

EUV pod with fastening structure

A reticle POD, comprising a top cover, a bottom cover, and a plurality of supporting components deployed in the four corners of the bottom cover, the supporting component comprising: a base body perpendicularly assembled, on two sides of which being disposed with mounting blocks; a pair of elastic elements respectively placed on the base body; a pair of leading elements connecting respectively to the horizontal extension of the elastic elements and then extending lengthwise to form a tip, a first bevel and a second bevel being formed on the side of the tip located on the inner side of the base body; a supporting base plate, the first and the second ends of which being connected to the second bevel of the leading element and a supporting pillar being disposed on the third end of the supporting base plate.

Reticle POD and supporting components therebetween

A wafer container includes a container body, a door, and a purging valve, wherein the purging valve is disposed in the through hole of the container body. The purging valve includes a fixed sleeve body, a purging head, an elastic component, and a valve lid. The fixed sleeve body comprises a base, and a lower opening is formed at the center of the base for the purging head to be disposed therein. The purging head comprises a bottom portion and a hollow sleeve portion protruding upward from the bottom portion, wherein the hollow sleeve portion is surroundingly disposed with elastic component and with vent disposed on its circumference wall. The valve lid is disposed on top of the hollow sleeve portion so that the purging head can move from the first position to the second position inside the fixed sleeve body when being propped up by an upward force.

Wafer container having the purging valve

This invention is related to a carrier of reticle pod. The carrier of reticle pod comprises an upper cover and a lower cover, and the upper cover is configured to be coupled to the lower cover to form an interior space for accommodation. The lower cover includes several pairs of guide tracks disposed on two opposite lateral sides of inner surface of the lower cover. Clapboards are set into the lower cover via the guide tracks to separate the space for accommodation into a plurality of spaces for accommodation for storing reticle pod. Fixing elements including a clipping portion and a resisting portion are disposed on the top surface of the inner surface of upper cover. When the upper cover closes the lower cover, each fixing element of the upper cover is configured to be coupled to each reticle pod stored in the carrier.

Carrier of reticle pod and the fixing element thereof

A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which, and a door, which is joined with opening of the container body for protecting the plurality of wafers in the container body, the characteristic in that: a magnetic member is formed at the inner edge of the opening of the container body and a magnet is disposed at the inner surface of the door corresponding to the magnetic member, the magnet being disposed in a magnetic yoke with recessed cross section, with the design of which the magnet on the door attracts the magnetic member at the opening of the container body for the door and the container body to be lock-fastened to each other.

Growing community of inventors

Tucheng, Taiwan

Pao-Yi Lu