Teknologian Tutkimuskeskus Vtt Oy

Kyocera Technologies Oy

Kyocera Tikitin Oy

Panu Koppinen

Antti Jaakkola

Teuvo Sillanpää

Markku Antero Ylilammi

Aarne Oja

Kai-Erik Elers

A MEMS (microelectromechanical system) resonator with a material layer of single-crystalline silicon, at least one layer made of material with low thermal diffusivity to reduce thermoelastic dissipations in the MEMS resonator, a layer of piezoelectric material, and a layer made of electrically conducting material. The layer with low thermal diffusivity is between the single-crystalline silicon layer and the piezoelectric layer, or between the piezoelectric layer and the electrically conducting layer. The use of a material layer of low thermal diffusivity.

MEMS resonator with high quality factor and its use

According to an example aspect of the present invention, there is provided an apparatus comprising a microelectromechanical, MEMS, capacitor comprising two plates and a gap between the plates, a gas conveyor configured to cause gas to flow through the gap, and readout circuitry configured to measure a capacitance of the MEMS capacitor.

Particle sensor

A microelectromechanical (MEMS) resonator includes a resonator structure having a plurality of beam elements and connection elements with certain geometry, where the plurality of beam elements are positioned adjacent to each other and adjacent beam elements are mechanically connected to each other by the connection elements, where the geometry of the beam elements or the connection elements varies within the resonator structure.

MEMS resonator

According to an example aspect of the present invention, there is provided an apparatus comprising a volume for receiving a gas sample; and an ultrasonic transducer; wherein the ultrasonic transducer is caused to generate a standing wave to the volume, said standing wave comprising at least one particle trapping zone for trapping particles carried by the gas sample, and to release particles trapped to the at least particle trapping zone by decreasing power of the standing wave to at least one lower power level and/or switching off the standing wave.

Trapping and releasing particles carried by gas sample

A capacitive pressure sensor for an internal combustion engine is provided having a housing having a bottom surface, variable capacitor and circuitry. The variable capacitor is formed by a stationary electrode and an elastically bendable electrode. Pressure exerted on the bottom surface acts to bend the elastically bendable electrode. This bending alters the capacitance of the variable capacitor. The circuitry is configured to generate a signal based on the variable capacitance of the variable capacitor. This capacitance is representative of the pressure exerted on the bottom surface.

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Espoo, Finland

Panu Koppinen