Semiconductor Manufacturing International (shanghai) Corporation

Semiconductor Manufacturing International (beijing) Corporation

Panpan Liu

Haiyang Zhang

Shiliang Ji

Semiconductor structure and fabrication method are provided. The semiconductor structure includes a substrate, including a first region and a second region; a plurality of fins, formed on the first region of the substrate; a first isolation structure, formed on the first region between adjacent fins and on the second region of the substrate; a second isolation structure, formed in each fin and in the first isolation structure, over the first region of the substrate; and a power rail, formed in the isolation structure and partially in the substrate of the second region.

Semiconductor structure and method for fabricating the same

The present disclosure provides a method for forming a semiconductor structure. The method includes providing a target etching layer; sequentially forming an initial mask layer, an anti-reflection layer, and a patterned structure on the target etching layer; performing a first etching process on the anti-reflection layer to remove a surface portion of the anti-reflection layer using the patterned structure as a mask; performing a surface treatment process on the patterned structure; and performing a second etching process on the anti-reflection layer until exposing a surface of the initial mask layer.

Semiconductor structure and fabrication method thereof

A semiconductor structure and its fabrication method are provided in the present disclosure. The method includes providing a substrate, forming a plurality of fins on the substrate, and forming an isolation structure layer including a plurality of isolation structures on the substrate, each isolation structure being formed between adjacent fins. The method further includes forming a first opening by etching at least one isolation structure of the plurality of isolation structures and a portion of the substrate, and forming a power rail by filling the first opening with a conductive material, where a top surface of the power rail is lower than a top surface of the plurality of fins.

Semiconductor structure and fabrication method are provided. The method includes providing a substrate including a first region and a second region; forming a plurality of fins on the first region of the substrate; forming an isolation structure on the first region and the second region of the substrate; forming a gate structure across the plurality of fins and on the isolation structure at the first region; etching the isolation structure and the substrate at the second region to form a first opening; filling the first opening with a conductive material layer; and etching the gate structure till exposing the isolation structure to form a second opening in the gate structure and removing a portion of the conductive material layer in the first opening to form a power rail.

Semiconductor structure and fabrication method are provided. The method includes providing a substrate including a first region and a second region; forming a plurality of fins on the first region of the substrate; forming a first isolation structure on the first region and the second region of the substrate; forming a gate structure and a dummy gate structure each across fins and the first isolation structure at the first region; forming an epitaxial layer in each fin on two sides of the gate structure; forming a first opening by etching a portion of each of the first isolation structure and the substrate that are at the second region; filling the first opening with a conductive material layer; removing the dummy gate structure and a portion of the conductive material layer in the first opening to form a power rail; and forming a second isolation structure in a second opening.

A 3-D flash memory device and its manufacturing method, relating to semiconductor technology. The manufacturing method comprises: providing a semiconductor structure comprising a substrate, a first insulation layer on the substrate, a fin structure comprising a first gate layer and a second insulation layer stacked alternately over each other on the first insulation layer, a third insulation layer on two sides of the fin structure, with the first gate layer being surrounded by the first, the second and the third insulation layers, and at least one channel layer covering the fin structure and the third insulation layer; and forming a groove by etching the channel layer, the second insulation layer and the first gate layer along an extension direction of the fin structure. This inventive concept improves the storage density of a 3-D flash memory device.

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Shanghai, China

Panpan Liu