Industrial Technology Research Institute

Pang-Min Shih

Chao-Feng Sung

Hsuan-Yu Lin

Yu-Lin Hsu

Kuo-Hsin Huang

Cheng-Yen Tsai

Chien-Hung Lin

Sue-Chen Liao

Shan-Ming Chang

A method for dynamic intelligent scheduling includes following steps: collecting and recording resource constraints of multiple schedules on a production line and decision data of changes made to the schedules by a scheduler; cross-enumerating schedule combinations by using multiple production goals as penalty conditions; establishing a mathematical model based on the resource constraints and multi-objective weights corresponding to each schedule combination and importing the resource constraints to calculate schedule results; recording the penalty condition corresponding to the schedule combination matching the decision data as a valid penalty; using values of parameters corresponding to the valid penalty and values of the penalty conditions respectively as inputs and outputs to train a learning model; and responding to a scheduling request, finding a weight of each schedule combination by using the learning model according to the resource constraint of the current schedule and the production goals, and generating a recommended schedule accordingly.

Method and apparatus for dynamic intelligent scheduling

A film thickness monitoring system is provided. The film thickness monitoring system includes a source, a valve, and a chamber. The source is configured to provide a deposition material. The valve is connected to the source. The chamber includes a manifold, a quartz crystal microbalance, and a pressure sensor. The manifold is connected to the valve and has at least one first nozzle and at least one second nozzle. The quartz crystal microbalance is disposed opposite to the at least one second nozzle. The deposition material is adapted to be deposited on the quartz crystal microbalance through the at least one second nozzle, and the quartz crystal microbalance includes a shutter facing the at least one second nozzle. The pressure sensor is disposed in the manifold. A method for monitoring a film thickness deposition process is also provided.

Film thickness monitoring system and method using the same

A driving module, being electrically connected to a control module and for driving a light emitting device with at least one light emitting element, is provided. The driving module has a driving circuit, which receives a control signal from the control module and transmits a drive current signal and a test current signal to the at least one light emitting element, so as to drive the least one light emitting element. A value of the drive current signal is expressed as If. A value of the test current signal is expressed as It. A relationship between the value of the drive current signal and the value of the test current signal satisfies the following equation (1), (It/If)=0.1%&#x2dc;35% . . . (1), the driving circuit generates a feedback signal based on a status of the least one light emitting element. A light source system having the driving module is provided.

Driving module and light source system having the driving module

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Hsinchu, Taiwan

Pang-Min Shih