Advanced Micro Devices Corporation

Semicaps Pte Ltd

Palaniappan Muthupalaniappan

Michael R Bruce

Brennan V Davis

Glen P Gilfeather

Lian Ser Koh

Choon Meng Chua

Soon Huat Tan

Jiann Min Chin

Richard Jacob Wilcox

Gregory A Dabney

Jacob Phang

Hoo-Yin Ng

Apparatus for and methods of inspection using laser beam induced alteration are provided. In one aspect, an apparatus is provided that includes a laser scanning microscope for directing a laser beam at a circuit structure and a source for biasing and thereby establishing a power condition in the circuit structure. A detection circuit is provided for detecting a change in the power condition in response to illumination of the circuit structure by the laser beam and generating a first output signal based on the detected change. A signal processor is provided for processing the first output signal and generating a second output signal based thereon. A control system is operable to scan the laser beam according to a pattern that has a plurality of pixel locations, whereby the laser beam may be moved to a given pixel location and allowed to dwell there for a selected time before being moved to another pixel location.

Laser beam induced phenomena detection

Growing community of inventors

Singapore, Singapore

Palaniappan Muthupalaniappan