Taiwan Semiconductor Manufacturing Comp. Ltd.

Pai-Lan Chen

Ming-Hsiu Hsieh

Wen Feng Wu

Hui-Ping Liu

Ching-Ren Chen

A manufacturing control and reporting method/system for manufacture of semiconductor devices comprises a system for loading a mechanical article handling device in a semiconductor manufacturing system, provides an automatic check-in and changing equipment status to an UP status, automatically checking whether the article handling system is empty, and for automatically changing the system status to an IDLE status. The system provides automatic check-in, and subsequent to processing of the workload by the plant provides track-out followed by automatically checking whether the article handling system is empty. Then the system checking whether a TE has arrived, and the system checks whether the TE has reloaded the article handling system.

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Hsinchu, Taiwan

Pai-Lan Chen