Applied Materials, Inc.

Trustees of the Colorado School of Mines

University of Colorado

Ozkan Celik

Patricia A Schulze

Gregory John Freeman

Paul Zachary Wirth

Tommaso Vercesi

Alexander N Lerner

Michael C Kutney

Zhaozhao Zhu

Richard L Weir

Chih Chung Chou

Stephen Huddle

Arunkumar Ramachandraiah

Barathwaj Murali

Greg Freeman

An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of target positions on the substrate, and a processing device. The processing device estimates a position of the substrate on the substrate holder and causes the first actuator to rotate the substrate holder about a first axis. The rotation causes an offset between a field of view of the second sensor and a target position on the substrate due to the substrate not being centered on the substrate holder. The processing device causes the second actuator to move the substrate holder linearly along a second axis to correct the offset. The processing device determines a profile across a surface of the substrate based on the one or more second measurements of the target positions.

Integrated substrate measurement system

A depth measuring apparatus includes a camera assembly configured to capture a plurality of images of a target at a plurality of distances from the target. The depth measuring apparatus further includes a controller configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine, based on the corresponding maximum gradient value, a depth measurement for a region of the plurality of regions.

Methods and apparatus for absolute and relative depth measurements using camera focus distance

Methods and apparatuses for aligning masks with substrates are provided. A method can include receiving a carrier having a substrate disposed thereon at an alignment stage of an alignment module, transferring a mask from a mask cassette of a mask stocker of the alignment module to a position over the alignment stage, and positioning the mask on the carrier. The method can also include acquiring one or more images of the mask and the substrate, where the mask contains one or more alignment holes passing through the mask and the substrate contains one or more alignment dots disposed on an upper surface of the substrate, analyzing the one or more images to determine one or more differences between one or more alignment holes of the mask and one or more alignment dots on the substrate, and aligning the mask with the substrate based on the differences.

Method for mask and substrate alignment

A depth measuring apparatus includes a camera assembly, a position sensor, and a controller. The camera assembly is configured to capture a plurality of images of a target at a plurality of distances from the target. The position sensor is configured to capture, for each of the plurality of images, corresponding position data associated with a relative distance between the camera assembly and the target. The controller is configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine a depth measurement for the region based on the corresponding maximum gradient and the corresponding position data captured for an image from the plurality of images that includes the corresponding maximum gradient.

A miniturized laminar gear box possessing high torque densities and methods of manufacturing the same. The high torque density is possible by directing the output shaft of the planetary stages through the sun gear and behind the input shaft. This allows the input shafts of the planetary stages to face towards the interior of the gearbox and provides a rotary shaft for the spur stages housed in between the planetary stages.

High torque density miniature laminar gear transmission

A depth measuring apparatus includes (1) a camera and lens assembly that captures image data for a sequence of images of a target including a plurality of depth levels; (2) a motion stage on which the camera and lens assembly or the target is positioned; (3) a motor connected to the motion stage that causes relative movement between the camera and lens assembly and the target at defined incremental values; (4) a position sensor that captures position data on the camera and lens assembly or the target at each of the defined incremental values; and (5) a controller that processes the captured image data and captured position data using an image gradient method and optimal focal distance to determine depths of the plurality of depth levels. Numerous other aspects are provided.

An exoskeleton device and method of using the same is provided that helps rehabilitate limbs such has the lower arm. Embodiments of the exoskeleton device have multiple degrees of freedom so that a limb such as the lower arm may flex or rotate in multiple directions to establish or re-establish neural connections in the brain. With the lower arm example, a person may grasp a handle in the exoskeleton and then flex the lower arm about a pronation/supination axis, a flexion/extension axis, and/or an abductor/adductor axis. The exoskeleton device has several modes of operation where actuators can aid the person's motion, resist the person's motion, or passively allow free motion of the person's limb.

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Cedar Park, TX, United States of America

Ozkan Celik