Average Co-Inventor Count = 9.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Cymer, Inc. (1 from 532 patents)
2. Carl Zeiss Industrielle Messtechnik Gmbh (1 from 233 patents)
1 patent:
1. 7277188 - Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate