Olin Microelectronic Chemicals, Inc.

Ottmar Rohde, Deceased

Carl-Lorenz Mertesdorf

Hans-Thomas Schacht

Norbert Muenzel

Pasquale Alfred Falcigno

Heinz Holzwarth

Hans-Jorg Kirner

Radiation-sensitive compositions comprising a substance which forms acid under the action of actinic radiation and polymers based on combination of different repeating units derived from hydroxy styrene and hydroxy-vinylcyclohexane derivatives wherein a portion of the hydroxyl groups are replaced with either acid-labile acetal or ketal protecting groups and where a portion of the repeating groups comprise two crosslinked species connected via the protecting groups.

Crosslinked polymers

Polymers based on combination of different repeating units derived from hydroxy styrene and hydroxyvinylcyclohexane derivatives wherein a portion of the hydroxyl groups are replaced with either acid-labile acetal or ketal protecting groups and where a portion of the repeating groups comprise two crosslinked species connected via the protecting groups.

Growing community of inventors

Eimeldingen, Germany

Ottmar Rohde, Deceased