Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Technische Unversität Berlin

Oswin Ehrmann

Thomas Fritzsch

Kai Zoschke

Hermann Oppermann

Martin Wilke

Markus Wöhrmann

A method for manufacturing metal structures for the electrical connection of components comprises the following steps: depositing an auxiliary layer on a substrate; structuring the auxiliary layer in a manner such that the substrate is exposed at least one environment which is envisaged for the metal structures; depositing a galvanic starting layer on the structured auxiliary layer; depositing a lithography layer on the galvanic starting layer and structuring the lithography layer in a manner such that the galvanic starting layer is exposed at least one location envisaged for the metal structure; galvanically depositing the at least one metal structure at the at least one exposed location; removing the structured auxiliary layer. An electronic component is also described.

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Berlin, Germany

Oswin Ehrmann