Toyo Tanso Co., Ltd.

Tokyo Electron Limited

Osamu Yoshimoto

Tetsuro Tojo

Jiro Hiraiwa

Hiroshi Hayakawa

Noriyuki Tanaka

Hitoshi Kato

Ken Nakao

Tsuneyuki Okabe

Takanobu Asano

Hitoshi Takebayashi

Yoshitomi Tada

Udai Tanaka

Minehiro Kamiyama

Shinichi Wada

Shigeru Ando

Megumu Dohi

A fluorine gas generation system includes a plurality of fluorine gas supply systems and a controller. Each of the fluorine gas supply systems includes a fluorine gas generation apparatus. Each of the fluorine gas supply systems is connected to a CVD device group. The fluorine gas generation apparatus includes a fluorine gas generator and a buffer tank. An opening/closing valve is inserted through a piping. The other end of the piping is branched into a plurality of pipings. Each of the pipings is connected to CVD devices. Pipings in the adjacent fluorine gas supply systems are connected to each other via a piping. An opening/closing valve is inserted through each of the pipings.

Gas supply system

Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.

Semiconductor manufacturing plant

A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.

Fluorogas generator

A fluorine gas generator is provided with which the gases used and/or generated, in case of leakage thereof, can be prevented from mixing together as far as possible and, even in case of gas leakage into the outside of the generator system, the leakage gas can be treated safely and in which the maintenance, exchange and other operations are easy to carry out. The generator comprises a box-shaped body containing an electrolyzer for fluorine gas generation, and the box-shaped body is divided into two or more compartments, including a compartment containing the electrolyzer.

Fluorine gas generator

A fluorine gas generator for generating highly pure fluorine gas in a stable and safe manner by electrolyzing an electrolytic bathcomprising hydrogen fluoride in the form of a molten mixed gas is provided which comprises an electrolytic celldivided, by a partition wallinto an anode chamberin which an anode is disposed and a cathode chamberin which a cathode is disposed, pressure maintenance means for maintaining the anode chamberand cathode chamberat atmospheric pressure, and liquid level sensing meanscapable of sensing the levels of the electrolytic bathin the anode chamberand in the cathode chamberrespectively, at three or more level stages.

A gas generator is provided in which the filter life is prolonged and the pressure regulating valve is thereby protected for a prolonged periods. The gas generator is intended for electrolyzing an electrolyte in an electrolytic cell to generate a gas or gases and comprises at least one absorber for absorbing an unnecessary by-products generated from the gas generator, a filter for removing the mist generated from the absorber, and at least one pressure regulating valve for adjusting the pressure in the electrolytic cell, wherein the filter is inserted downstream from the absorber and, further, the pressure regulating valve is disposed downstream from the filter.

Gas generator

A fluorine gas generator for generating fluorine gas by electrolysis of an electrolytic bath comprising a hydrogen fluoride-containing mixed molten salt in which generator the position of the electrolytic bath liquid surface in the electrolytic cell can be safely controlled even during suspension of electrolysis therein is provided. The generator comprises an anode chamber and a cathode chamber separated from each other by a partition wall and is provided with electrolytic bath liquid level controlling means for controlling the electrolytic bath liquid level in at least one of the anode chamber and cathode chamber during suspension of fluorine gas generation.

Fluorine gas generator and method of electrolytic bath liquid level control

Since the system for supplying gas comprises a storage container, a compressor which pressurizes fluorine gas in the storage container, and a pressurized storing container which presses fit and stores the fluorine gas, by supplying fluorine gas or the like to the destination from this system for supplying gas, it is not necessary to change gas source such as a gas cylinder or the like. In this way, fluorine gas or the like can be supplied to the destination inexpensively and safely.

System for supplying halogen gas or halogen containing gas and method thereof

An apparatus for controlling a molten salt electrolyzer in which an electrolytic bath in a solid form as contained in the electrolyzer is melted to automatically attain a state allowing electrolysis, which apparatus comprises detecting means for detecting the changes in state of the electrolyzer by means of detectors fitted to the electrolyzer, and adjusting means for adjusting, after using the detecting means, the liquid electrolytic bath levels to a state allowing electrolysis.

Apparatus and method for molten salt electrolytic bath control

The invention provides a method and apparatus for current control in gas generators capable of generating a fluorine or fluoride gas by and in which the electrolysis can be maintained in an optimum condition, stable operation is possible and no manpower is demanded. According to the method of current control in gas generators for generating a fluorine or fluoride gas by electrolysis of an electrolytic bathcomprising a hydrogen fluoride-containing mixed molten salt using a carbon electrode as the anode, the range of voltage fluctuation between the cathodeand anodeas occurring when a certain current is applied to the gas generator is measured, and current application is continued while varying the current amount to be applied according to the voltage fluctuation range.

Electric current control method and apparatus for use in gas generators

A method of efficiently supplying terrestrial plants with raising substances such as a solution comprises the steps of: producing a solution by an electrolysis of a water using a carbonaceous electrode; reducing the produced solution to minute particles or fine spray; and supplying the solution to the terrestrial plants including leaves entirely. An apparatus includes a container for storing water having at least a water inlet and a water outlet; a pair of electrodes comprising an anode and a cathode provided in the container, at least the anode being made of composition of carbonaceous materials and cured resins and molded into a plate-like form; a power supply to supply an electric current between the pair of electrodes to produce a solution by an electrolysis of the water; and a pump connected with the water outlet in the container for supplying the solution to the terrestrial plants.

Growing community of inventors

Osaka, Japan

Osamu Yoshimoto