Hitachi-kokusai Electric Inc.

Kokusai Electric Corporation

Osamu Ueda

Kazuhide Asai

Hiroyuki Iwakura

Kazuyoshi Yamamoto

Kayoko Yashiki

Shuai Yuan

Yusuke Sakamoto

There is provided a technique that includes: a first storage configured to store request data from a terminal apparatus; a second storage configured to store information from a processing apparatus; and a controller configured to be capable of searching one of the first storage and the second storage based on the received request data and acquiring information of the processing apparatus corresponding to contents of the request data by using at least one selected from the group of the first storage and the second storage.

Management apparatus, method of processing data, recording medium, method of manufacturing semiconductor device, and processing system

There is provided a configuration that includes a plurality of substrate processing apparatuses and a management device for managing the plurality of substrate processing apparatuses. Upon receiving information specifying a substrate processing apparatus as a reference and file information designating a predetermined device file, the plurality of substrate processing apparatuses transmits request data including first device information and first data information to the management device. Upon receiving the request data, the management device transmits the received request data to the reference substrate processing apparatus. The reference substrate processing apparatus creates response data including second data information responding to the first data information and transmits the created response data to the management device. Upon receiving the response data, the management device transmits the received response data to the plurality of substrate processing apparatuses. The plurality of substrate processing apparatuses acquires the second data information from the response data.

Substrate processing system, substrate processing apparatus and management device

There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible.

Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus

There are provided at least one or more of substrate processing apparatuses that process a substrate, and a group management device connected to each substrate processing apparatus, so that the group management device monitors an operation state of the substrate processing apparatus, thereby grasping a timing of updating a program of the substrate processing apparatus, and when the timing arrives, updates the program.

Growing community of inventors

Toyama, Japan

Osamu Ueda