Kabushiki Kaisha Toshiba

Osamu Tanaka

Teruo Nakagawa

Keigo Toriumi

Kohei Shibano

Mitsuhiro Shibata

Provided is a reticle storage container including an inner containerwhich can store a plurality of reticlesand an outer containerwhich covers the inner container. The outer containeris configured to include a gas nozzlewhich can inject a predetermined gas. The same gas as the gas supplied into an exposure apparatusis supplied to the gas nozzle. The gas injected into the reticle storage container is vented through a vent holeinstalled to the inner container

Substrate storage container and exposure apparatus

A turbine bladewhich is a stop blade is provided with a cutout portionwhich is formed in one circumferential side surfaceof a shank portionat the center in the axial direction of a turbine rotor, a cutout portionwhich is formed in one circumferential side surfaceof the shank portionfrom one end portionto the cutout portionin the axial direction of the turbine rotor, and a through passagewhich is formed to pass from the cutout portionto an effective blade part and in which a moving member, which moves a stopper memberto the effective blade part in the cutout portion, is inserted.

Turbine blade assembly and steam turbine

A power supply for negative impedance discharge loads such as discharge tubes used in gas laser systems, in which the discharge power is supplied not from the voltage source but from the current source through the current transformer so that stabilized and well balanced discharge currents can be supplied to a plurality of discharge loads.

Growing community of inventors

Mie, Japan

Osamu Tanaka