Toyo Tanso Co., Ltd.

Osamu Tamura

Yoshihisa Abe

Masanari Watanabe

Provided is a method for carburizing a tantalum member whereby the tantalum member is less deformed by carburization and can be carburized with good flatness of the planar part thereof and in a uniform manner. The method is a method for subjecting a tantalum membermade of tantalum or a tantalum alloy and having a planar partto a carburization process for allowing carbon to penetrate the memberfrom the surface toward the inner portion thereof and includes the steps of: setting the tantalum memberin a chambercontaining a carbon source by supporting the planar parton a plurality of support rodstapered at distal endsthereof; and subjecting the tantalum memberto a carburization process by reducing in pressure and heating the interior of the chamberto allow carbon derived from the carbon source to penetrate the tantalum memberfrom the surface thereof.

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Osaka, Japan

Osamu Tamura